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- W2022374885 abstract "B S TO2 Gas Cluster Ion Beam assisted deposition technique has been developed to form ultra high quality tin doped indium-oxide (UHQ-ITO) films. This deposition process uses large cluster ions which can transport thousands of atoms in a ion with very low energy per constituent atom. Interactions between cluster ions and substrate atoms occur in the near-surface region and cluster ions can deposit their energy with a high density in a very localized surface region. The energetic oxygen clusters collapsed at the surface and reacted with the metal atoms and about 10% of them were incorporated, when the kinetic energy of the cluster ion was above 5 keV. Oxidation reaction can be enhanced by energetic cluster ion bombardment which offers a new technique for ion assisted thin film formation. Very smooth, highly transparent (>80 %) and low resistivity films, were obtained by using a 7 keV oxygen cluster ion beam. In order to realize high throughput for industrial application, a Multi-beam Gas Cluster Ion Beam eq..." @default.
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- W2022374885 date "2001-01-01" @default.
- W2022374885 modified "2023-09-24" @default.
- W2022374885 title "O[sub 2] cluster ion assisted deposition for tin doped indium oxide (ITO) films" @default.
- W2022374885 cites W2034080934 @default.
- W2022374885 doi "https://doi.org/10.1063/1.1395472" @default.
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