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- W2022381303 abstract "The sp3-bonded carbon/SiC composite films have been produced from electron beam-physical vapor deposition of SiC materials. The hardness of such films, measured using Hysitron indentation, reaches 50GPa, which is significantly higher than the hardness of SiC (28GPa). It appears that the superhardness of the thin films is due to the formation of nanocrystalline SiC/diamondlike carbon composites." @default.
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- W2022381303 date "2007-12-10" @default.
- W2022381303 modified "2023-09-24" @default.
- W2022381303 title "Surface hardness enhancement in sp3-bonded carbon doped SiC nanocomposite films" @default.
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- W2022381303 doi "https://doi.org/10.1063/1.2824811" @default.
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