Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022382070> ?p ?o ?g. }
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73
with 100 items per page.
- W2022382070 endingPage "501" @default.
- W2022382070 startingPage "493" @default.
- W2022382070 abstract "Advanced VLSI devices are nowadays required to raise switching speed, to improve noise immunity and to minimize chip size. Presently, MeV ion implantation attracts much technological attention in the field of VLSI fabrication, because it is expected to be one of the most feasible solutions to those demanding requirements. In order to realize such prospective expectations, an RFQ (radio-frequency quadrupole) accelerator was applied for the first time to the field of ion implantation and a MeV ion implantation system “RFQ-1000” has been developed. First, we briefly refer to the background of the system development, putting emphasis on the RFQ. Next an outline is given of the system configuration and features. Following, detailed performances of the system are described, i.e., beam current capability, energy variability, dose uniformity, particle performance and so on. Then we move onto the viewpoint of applications. The current status of device applications by the MeV ion implantation are briefly reviewed. Finally future applications of the system to the field of compound semiconductors and to the surface modification of materials are presented." @default.
- W2022382070 created "2016-06-24" @default.
- W2022382070 creator A5033198487 @default.
- W2022382070 creator A5056209609 @default.
- W2022382070 creator A5070972892 @default.
- W2022382070 date "1991-04-01" @default.
- W2022382070 modified "2023-09-27" @default.
- W2022382070 title "The MeV ion implantation system “RFQ-1000” and its applications" @default.
- W2022382070 cites W1524761569 @default.
- W2022382070 cites W1970104593 @default.
- W2022382070 cites W1977587322 @default.
- W2022382070 cites W1990006118 @default.
- W2022382070 cites W2000523942 @default.
- W2022382070 cites W2056883253 @default.
- W2022382070 cites W2082864020 @default.
- W2022382070 cites W2091752572 @default.
- W2022382070 cites W2264035971 @default.
- W2022382070 doi "https://doi.org/10.1016/0168-583x(91)96219-b" @default.
- W2022382070 hasPublicationYear "1991" @default.
- W2022382070 type Work @default.
- W2022382070 sameAs 2022382070 @default.
- W2022382070 citedByCount "4" @default.
- W2022382070 crossrefType "journal-article" @default.
- W2022382070 hasAuthorship W2022382070A5033198487 @default.
- W2022382070 hasAuthorship W2022382070A5056209609 @default.
- W2022382070 hasAuthorship W2022382070A5070972892 @default.
- W2022382070 hasConcept C119599485 @default.
- W2022382070 hasConcept C120665830 @default.
- W2022382070 hasConcept C121332964 @default.
- W2022382070 hasConcept C127413603 @default.
- W2022382070 hasConcept C145148216 @default.
- W2022382070 hasConcept C14580979 @default.
- W2022382070 hasConcept C168834538 @default.
- W2022382070 hasConcept C189166818 @default.
- W2022382070 hasConcept C2776360784 @default.
- W2022382070 hasConcept C41008148 @default.
- W2022382070 hasConcept C41823505 @default.
- W2022382070 hasConcept C50774322 @default.
- W2022382070 hasConcept C62520636 @default.
- W2022382070 hasConceptScore W2022382070C119599485 @default.
- W2022382070 hasConceptScore W2022382070C120665830 @default.
- W2022382070 hasConceptScore W2022382070C121332964 @default.
- W2022382070 hasConceptScore W2022382070C127413603 @default.
- W2022382070 hasConceptScore W2022382070C145148216 @default.
- W2022382070 hasConceptScore W2022382070C14580979 @default.
- W2022382070 hasConceptScore W2022382070C168834538 @default.
- W2022382070 hasConceptScore W2022382070C189166818 @default.
- W2022382070 hasConceptScore W2022382070C2776360784 @default.
- W2022382070 hasConceptScore W2022382070C41008148 @default.
- W2022382070 hasConceptScore W2022382070C41823505 @default.
- W2022382070 hasConceptScore W2022382070C50774322 @default.
- W2022382070 hasConceptScore W2022382070C62520636 @default.
- W2022382070 hasIssue "1-4" @default.
- W2022382070 hasLocation W20223820701 @default.
- W2022382070 hasOpenAccess W2022382070 @default.
- W2022382070 hasPrimaryLocation W20223820701 @default.
- W2022382070 hasRelatedWork W1623063880 @default.
- W2022382070 hasRelatedWork W1907800457 @default.
- W2022382070 hasRelatedWork W2007350853 @default.
- W2022382070 hasRelatedWork W2009246791 @default.
- W2022382070 hasRelatedWork W2027308617 @default.
- W2022382070 hasRelatedWork W2036211671 @default.
- W2022382070 hasRelatedWork W2186443371 @default.
- W2022382070 hasRelatedWork W2384925992 @default.
- W2022382070 hasRelatedWork W3039334009 @default.
- W2022382070 hasRelatedWork W610887201 @default.
- W2022382070 hasVolume "55" @default.
- W2022382070 isParatext "false" @default.
- W2022382070 isRetracted "false" @default.
- W2022382070 magId "2022382070" @default.
- W2022382070 workType "article" @default.