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- W2022384949 abstract "Experimental results to fabricate Si-based light-emitting materials by Si and N coimplantation into SiO2 films are reported. Intense photoluminescence (PL) was observed from the implanted samples with and without annealing. The PL intensity varied with the increased annealing temperature and had a maximum at about 600°C. The X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared (FTIR) spectra were used to characterised the microstructures. It is suggested that the PL may originate from N-related defects and/or Si–O-based species." @default.
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- W2022384949 date "1999-07-01" @default.
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- W2022384949 title "Efficient Si-based light-emitting materials fabricated by Si- and N-coimplanted SiO2 films" @default.
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- W2022384949 doi "https://doi.org/10.1016/s0167-577x(99)00052-x" @default.
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