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- W2022449905 abstract "A varied-line-space grating is used in modern soft X-ray monochromators with a high resolving power. The grating parameters require high accuracy because errors of the parameters lead to the degradation of the resolving power. The parameter tolerances required to maintain a high resolving power were estimated by analytical calculation. The groove density variations of three gratings were measured with a long trace profiler. The measured errors in the parameters were found to be sufficiently small." @default.
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- W2022449905 date "2012-10-15" @default.
- W2022449905 modified "2023-10-16" @default.
- W2022449905 title "Measurement of groove density variation of varied-line-space grating for high-resolution soft x-ray monochromator" @default.
- W2022449905 doi "https://doi.org/10.1117/12.936518" @default.
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