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- W2022553601 abstract "The diffusion coefficients of sputtered particles through Ar are directly measured by using a rotating collector of particles sputtered in a pulsed discharge. The total amount of diffusing substance W (t) as a function of time is obtained from the deposit on the collector. The asymptote of W (t) has the intercept t0 on the t axis given by t0=L2/6D, so that D can be determined by an observation of t0. The experimental results show that the coefficient of diffusion varies inversely with the square root of the mass of the sputtered particle and the value of Dp is 35 cm2 Torr/sec for Cu in Ar." @default.
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- W2022553601 date "1979-05-01" @default.
- W2022553601 modified "2023-09-23" @default.
- W2022553601 title "Direct measurement of diffusion coefficients of sputtered atoms in Ar" @default.
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- W2022553601 doi "https://doi.org/10.1063/1.326297" @default.
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