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- W2022604352 abstract "A significant increase in Vmin failures was observed with device shrinkage. These Vmin failures were observed to be random on wafer and were highly correlated to I DDQ and Delta I DDQ failures. A strong correlation of Vmin failures to STI depth was found. Fault isolation showed that the root cause of our Vmin failures was due to stress related dislocations. Structural and electrical characterizations were used to confirm the proposed root cause mechanism. This paper presents a simple and cost effective method in resolving high Vmin failure rate in production devices. With the new process, a significant yield gain was achieved." @default.
- W2022604352 created "2016-06-24" @default.
- W2022604352 creator A5005771712 @default.
- W2022604352 creator A5063000222 @default.
- W2022604352 creator A5067459061 @default.
- W2022604352 creator A5070236295 @default.
- W2022604352 creator A5082589095 @default.
- W2022604352 date "2006-09-01" @default.
- W2022604352 modified "2023-09-26" @default.
- W2022604352 title "Elimination of Vmin failures in 0.15um logic process" @default.
- W2022604352 cites W1555407400 @default.
- W2022604352 cites W2009765192 @default.
- W2022604352 cites W2114583855 @default.
- W2022604352 cites W2125353242 @default.
- W2022604352 cites W2127145135 @default.
- W2022604352 cites W2146414378 @default.
- W2022604352 cites W2536698305 @default.
- W2022604352 cites W2540536172 @default.
- W2022604352 doi "https://doi.org/10.1109/issm.2006.4493047" @default.
- W2022604352 hasPublicationYear "2006" @default.
- W2022604352 type Work @default.
- W2022604352 sameAs 2022604352 @default.
- W2022604352 citedByCount "1" @default.
- W2022604352 crossrefType "proceedings-article" @default.
- W2022604352 hasAuthorship W2022604352A5005771712 @default.
- W2022604352 hasAuthorship W2022604352A5063000222 @default.
- W2022604352 hasAuthorship W2022604352A5067459061 @default.
- W2022604352 hasAuthorship W2022604352A5070236295 @default.
- W2022604352 hasAuthorship W2022604352A5082589095 @default.
- W2022604352 hasConcept C111919701 @default.
- W2022604352 hasConcept C11413529 @default.
- W2022604352 hasConcept C127313418 @default.
- W2022604352 hasConcept C127413603 @default.
- W2022604352 hasConcept C131017901 @default.
- W2022604352 hasConcept C160671074 @default.
- W2022604352 hasConcept C165205528 @default.
- W2022604352 hasConcept C175551986 @default.
- W2022604352 hasConcept C192562407 @default.
- W2022604352 hasConcept C200601418 @default.
- W2022604352 hasConcept C41008148 @default.
- W2022604352 hasConcept C49040817 @default.
- W2022604352 hasConcept C84945661 @default.
- W2022604352 hasConcept C98045186 @default.
- W2022604352 hasConceptScore W2022604352C111919701 @default.
- W2022604352 hasConceptScore W2022604352C11413529 @default.
- W2022604352 hasConceptScore W2022604352C127313418 @default.
- W2022604352 hasConceptScore W2022604352C127413603 @default.
- W2022604352 hasConceptScore W2022604352C131017901 @default.
- W2022604352 hasConceptScore W2022604352C160671074 @default.
- W2022604352 hasConceptScore W2022604352C165205528 @default.
- W2022604352 hasConceptScore W2022604352C175551986 @default.
- W2022604352 hasConceptScore W2022604352C192562407 @default.
- W2022604352 hasConceptScore W2022604352C200601418 @default.
- W2022604352 hasConceptScore W2022604352C41008148 @default.
- W2022604352 hasConceptScore W2022604352C49040817 @default.
- W2022604352 hasConceptScore W2022604352C84945661 @default.
- W2022604352 hasConceptScore W2022604352C98045186 @default.
- W2022604352 hasLocation W20226043521 @default.
- W2022604352 hasOpenAccess W2022604352 @default.
- W2022604352 hasPrimaryLocation W20226043521 @default.
- W2022604352 hasRelatedWork W1836961878 @default.
- W2022604352 hasRelatedWork W2367494210 @default.
- W2022604352 hasRelatedWork W2370652759 @default.
- W2022604352 hasRelatedWork W2376932109 @default.
- W2022604352 hasRelatedWork W2379162918 @default.
- W2022604352 hasRelatedWork W2390279801 @default.
- W2022604352 hasRelatedWork W2748952813 @default.
- W2022604352 hasRelatedWork W2899084033 @default.
- W2022604352 hasRelatedWork W831794578 @default.
- W2022604352 hasRelatedWork W2012842278 @default.
- W2022604352 isParatext "false" @default.
- W2022604352 isRetracted "false" @default.
- W2022604352 magId "2022604352" @default.
- W2022604352 workType "article" @default.