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- W2022634468 abstract "On décrit une méthode d'élaboration de couches minces de nitrure de niobium par pulvérisation cathodique réactive. On étudie l'influence des conditions d'élaboration sur la composition, la structure et les propriétés (résistivité, coefficient de température et température critique) des couches déposées. La température critique maximum (15,85 K) mesurée correspond au nitrure de niobium stoechiométrique. On met également en évidence l'existence d'un nitrure de formule Nb1 − xN (0 < x < 0,34) dont la structure est identique à celle de δ-NbN. The formation of thin films of niobium nitride by reactive sputtering is described. The influence of the various parameters employed in the preparation on the composition, structure and electrical properties (resistivity, temperature coefficient and critical temperature) of these films has been investigated. The maximum observed critical temperature (15.85 K) corresponds to the formation of the stoichiometric compound niobium nitride. The existence of a material of composition Nb1 − xN (0 < x < 0.34) with the same structure as δ-NbN has also been observed." @default.
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- W2022634468 date "1974-04-01" @default.
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- W2022634468 title "Propriétés et structure des couches minces de nitrure de niobium élaborées par pulvérisation cathodique réactive I. Élaboration et propriétés" @default.
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- W2022634468 doi "https://doi.org/10.1016/0022-5088(74)90230-6" @default.
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