Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022646384> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2022646384 abstract "Abstract The Ar + laser-induced chemical etching of Mo films on glass substrates in Cl 2 atmosphere has been investigated. The dependence of the etch rate on laser power can be interpreted in terms of a thermally activated chemical reaction involving Cl 2 molecules. Within certain ranges of experimental parameters the formation of regular structures is observed." @default.
- W2022646384 created "2016-06-24" @default.
- W2022646384 creator A5038798893 @default.
- W2022646384 creator A5074296815 @default.
- W2022646384 creator A5082053930 @default.
- W2022646384 date "1989-01-01" @default.
- W2022646384 modified "2023-09-27" @default.
- W2022646384 title "Ar+ laser-induced chemical etching of molybdenum in chlorine atmosphere" @default.
- W2022646384 cites W1513198075 @default.
- W2022646384 cites W1989913146 @default.
- W2022646384 cites W2006586025 @default.
- W2022646384 cites W2030355677 @default.
- W2022646384 cites W2031503791 @default.
- W2022646384 cites W2062031688 @default.
- W2022646384 cites W2062491551 @default.
- W2022646384 cites W2088356688 @default.
- W2022646384 cites W2154561242 @default.
- W2022646384 cites W3014990703 @default.
- W2022646384 doi "https://doi.org/10.1016/0039-6028(89)90047-2" @default.
- W2022646384 hasPublicationYear "1989" @default.
- W2022646384 type Work @default.
- W2022646384 sameAs 2022646384 @default.
- W2022646384 citedByCount "13" @default.
- W2022646384 crossrefType "journal-article" @default.
- W2022646384 hasAuthorship W2022646384A5038798893 @default.
- W2022646384 hasAuthorship W2022646384A5074296815 @default.
- W2022646384 hasAuthorship W2022646384A5082053930 @default.
- W2022646384 hasConcept C100460472 @default.
- W2022646384 hasConcept C113196181 @default.
- W2022646384 hasConcept C120665830 @default.
- W2022646384 hasConcept C121332964 @default.
- W2022646384 hasConcept C177801218 @default.
- W2022646384 hasConcept C178790620 @default.
- W2022646384 hasConcept C179104552 @default.
- W2022646384 hasConcept C185592680 @default.
- W2022646384 hasConcept C192562407 @default.
- W2022646384 hasConcept C2779227376 @default.
- W2022646384 hasConcept C32909587 @default.
- W2022646384 hasConcept C33220542 @default.
- W2022646384 hasConcept C505241676 @default.
- W2022646384 hasConcept C520434653 @default.
- W2022646384 hasConcept C549387045 @default.
- W2022646384 hasConcept C65440619 @default.
- W2022646384 hasConcept C97355855 @default.
- W2022646384 hasConceptScore W2022646384C100460472 @default.
- W2022646384 hasConceptScore W2022646384C113196181 @default.
- W2022646384 hasConceptScore W2022646384C120665830 @default.
- W2022646384 hasConceptScore W2022646384C121332964 @default.
- W2022646384 hasConceptScore W2022646384C177801218 @default.
- W2022646384 hasConceptScore W2022646384C178790620 @default.
- W2022646384 hasConceptScore W2022646384C179104552 @default.
- W2022646384 hasConceptScore W2022646384C185592680 @default.
- W2022646384 hasConceptScore W2022646384C192562407 @default.
- W2022646384 hasConceptScore W2022646384C2779227376 @default.
- W2022646384 hasConceptScore W2022646384C32909587 @default.
- W2022646384 hasConceptScore W2022646384C33220542 @default.
- W2022646384 hasConceptScore W2022646384C505241676 @default.
- W2022646384 hasConceptScore W2022646384C520434653 @default.
- W2022646384 hasConceptScore W2022646384C549387045 @default.
- W2022646384 hasConceptScore W2022646384C65440619 @default.
- W2022646384 hasConceptScore W2022646384C97355855 @default.
- W2022646384 hasLocation W20226463841 @default.
- W2022646384 hasOpenAccess W2022646384 @default.
- W2022646384 hasPrimaryLocation W20226463841 @default.
- W2022646384 hasRelatedWork W1503482933 @default.
- W2022646384 hasRelatedWork W1583114810 @default.
- W2022646384 hasRelatedWork W196679807 @default.
- W2022646384 hasRelatedWork W1975935558 @default.
- W2022646384 hasRelatedWork W1984770226 @default.
- W2022646384 hasRelatedWork W1990379070 @default.
- W2022646384 hasRelatedWork W1995939507 @default.
- W2022646384 hasRelatedWork W1998143021 @default.
- W2022646384 hasRelatedWork W2005871931 @default.
- W2022646384 hasRelatedWork W2008353189 @default.
- W2022646384 hasRelatedWork W2028006899 @default.
- W2022646384 hasRelatedWork W2038734428 @default.
- W2022646384 hasRelatedWork W2061512655 @default.
- W2022646384 hasRelatedWork W2065999079 @default.
- W2022646384 hasRelatedWork W2067298390 @default.
- W2022646384 hasRelatedWork W2094110977 @default.
- W2022646384 hasRelatedWork W2131763979 @default.
- W2022646384 hasRelatedWork W2491925855 @default.
- W2022646384 hasRelatedWork W2507143311 @default.
- W2022646384 hasRelatedWork W1971060376 @default.
- W2022646384 isParatext "false" @default.
- W2022646384 isRetracted "false" @default.
- W2022646384 magId "2022646384" @default.
- W2022646384 workType "article" @default.