Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022652848> ?p ?o ?g. }
- W2022652848 endingPage "272" @default.
- W2022652848 startingPage "262" @default.
- W2022652848 abstract "ZrO2 films were grown on Si and SiO2 substrates in the temperature range of 250–500°C using atomic layer deposition (ALD) technique. ZrI4 and H2O–H2O2 solution were used as metal and oxygen precursors. The refractive index of the 50–125 nm thick films, measured at 580 nm wavelength, varied between 2.05 and 2.25 slightly decreasing with increasing growth temperature. The film growth rate also decreased with the increase in temperature. The films contained cubic and/or tetragonal ZrO2 phases. The cubic phase was preferentially formed at relatively low deposition temperatures and in the beginning of the growth process. In addition, monoclinic ZrO2 was detected in the films thicker than 40–50 nm." @default.
- W2022652848 created "2016-06-24" @default.
- W2022652848 creator A5007736907 @default.
- W2022652848 creator A5012851874 @default.
- W2022652848 creator A5033516634 @default.
- W2022652848 creator A5034289485 @default.
- W2022652848 creator A5037914316 @default.
- W2022652848 creator A5046572961 @default.
- W2022652848 creator A5052591354 @default.
- W2022652848 creator A5062770241 @default.
- W2022652848 creator A5081018621 @default.
- W2022652848 date "2001-09-01" @default.
- W2022652848 modified "2023-10-15" @default.
- W2022652848 title "Atomic layer deposition of zirconium oxide from zirconium tetraiodide, water and hydrogen peroxide" @default.
- W2022652848 cites W1555753450 @default.
- W2022652848 cites W1676165525 @default.
- W2022652848 cites W1964393316 @default.
- W2022652848 cites W1969223030 @default.
- W2022652848 cites W1969997189 @default.
- W2022652848 cites W1972003927 @default.
- W2022652848 cites W1975723995 @default.
- W2022652848 cites W1990432325 @default.
- W2022652848 cites W1995625631 @default.
- W2022652848 cites W2010153984 @default.
- W2022652848 cites W2012314525 @default.
- W2022652848 cites W2016144889 @default.
- W2022652848 cites W2019592005 @default.
- W2022652848 cites W2021813719 @default.
- W2022652848 cites W2023882444 @default.
- W2022652848 cites W2027458596 @default.
- W2022652848 cites W2030802549 @default.
- W2022652848 cites W2031058336 @default.
- W2022652848 cites W2037039892 @default.
- W2022652848 cites W2039685521 @default.
- W2022652848 cites W2040582665 @default.
- W2022652848 cites W2044481057 @default.
- W2022652848 cites W2046155762 @default.
- W2022652848 cites W2047851250 @default.
- W2022652848 cites W2050584394 @default.
- W2022652848 cites W2059206441 @default.
- W2022652848 cites W2060174152 @default.
- W2022652848 cites W2064726575 @default.
- W2022652848 cites W2071303417 @default.
- W2022652848 cites W2073651843 @default.
- W2022652848 cites W2075125466 @default.
- W2022652848 cites W2076528220 @default.
- W2022652848 cites W2087003473 @default.
- W2022652848 cites W2089653545 @default.
- W2022652848 cites W2095024313 @default.
- W2022652848 cites W2105786003 @default.
- W2022652848 cites W2118486175 @default.
- W2022652848 cites W2142450559 @default.
- W2022652848 cites W2144319835 @default.
- W2022652848 cites W2319461953 @default.
- W2022652848 cites W2950835385 @default.
- W2022652848 cites W4250468202 @default.
- W2022652848 cites W2043981201 @default.
- W2022652848 doi "https://doi.org/10.1016/s0022-0248(01)01449-x" @default.
- W2022652848 hasPublicationYear "2001" @default.
- W2022652848 type Work @default.
- W2022652848 sameAs 2022652848 @default.
- W2022652848 citedByCount "76" @default.
- W2022652848 countsByYear W20226528482012 @default.
- W2022652848 countsByYear W20226528482013 @default.
- W2022652848 countsByYear W20226528482014 @default.
- W2022652848 countsByYear W20226528482015 @default.
- W2022652848 countsByYear W20226528482016 @default.
- W2022652848 countsByYear W20226528482017 @default.
- W2022652848 countsByYear W20226528482018 @default.
- W2022652848 countsByYear W20226528482019 @default.
- W2022652848 countsByYear W20226528482021 @default.
- W2022652848 countsByYear W20226528482022 @default.
- W2022652848 countsByYear W20226528482023 @default.
- W2022652848 crossrefType "journal-article" @default.
- W2022652848 hasAuthorship W2022652848A5007736907 @default.
- W2022652848 hasAuthorship W2022652848A5012851874 @default.
- W2022652848 hasAuthorship W2022652848A5033516634 @default.
- W2022652848 hasAuthorship W2022652848A5034289485 @default.
- W2022652848 hasAuthorship W2022652848A5037914316 @default.
- W2022652848 hasAuthorship W2022652848A5046572961 @default.
- W2022652848 hasAuthorship W2022652848A5052591354 @default.
- W2022652848 hasAuthorship W2022652848A5062770241 @default.
- W2022652848 hasAuthorship W2022652848A5081018621 @default.
- W2022652848 hasConcept C113196181 @default.
- W2022652848 hasConcept C115624301 @default.
- W2022652848 hasConcept C121332964 @default.
- W2022652848 hasConcept C151730666 @default.
- W2022652848 hasConcept C153294291 @default.
- W2022652848 hasConcept C170751736 @default.
- W2022652848 hasConcept C171250308 @default.
- W2022652848 hasConcept C178790620 @default.
- W2022652848 hasConcept C179104552 @default.
- W2022652848 hasConcept C185592680 @default.
- W2022652848 hasConcept C19067145 @default.
- W2022652848 hasConcept C192562407 @default.
- W2022652848 hasConcept C2779227376 @default.
- W2022652848 hasConcept C2779851234 @default.
- W2022652848 hasConcept C2816523 @default.