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- W2022659434 abstract "A flow-tube method has been used to investigate the pyrolysis of indium trimethyl and indium trimethyl-phosphorus triethyl adduct, as part of an investigation of the MOCVD process for epitaxial deposition of InP and related semiconductors. At partial pressures close to those used in MOCVD the rate of pyrolysis of indium trimethyl was found to be dependent on the nature of the reactor surface, being faster on glass than on (100) InP. At higher pressures this difference was not observed. The pyrolysis of the adduct proceeds via gas-phase dissociation to the two constituents followed by decomposition of indium trimethyl. The implications for MOCVD are discussed." @default.
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- W2022659434 date "1984-09-01" @default.
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- W2022659434 title "The mechanism of the growth of InP by MOCVD: A flow-tube investigation of the pyrolysis of the indium precursor" @default.
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- W2022659434 doi "https://doi.org/10.1016/0022-0248(84)90463-9" @default.
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