Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022673856> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2022673856 abstract "This paper reports a novel maskless nanoscale material etching method based on microplasma devices arrays. That is, inverted pyramidal microplasma devices arrays are integrated into the scanning probe tips array to realize maskless nanoscale material etching with advantages of high efficiency, large area and low cost. A 4×4 inverted pyramidal microplasma device array with each microcavity dimension of 50μm was successfully fabricated by MEMS process. Experiment results showed that the microplasma devices arrays could ignite in rare gas Ar under dc excitation. Ballast resistance in electrical testing system played an important roles in device array ignitions. V-I characteristics of the device array at 10kpa of Ar was in negative glow discharge mode. This work may lay a good foundation for future maskless microplasma nanoscale material etching." @default.
- W2022673856 created "2016-06-24" @default.
- W2022673856 creator A5040985856 @default.
- W2022673856 creator A5041362389 @default.
- W2022673856 creator A5050936283 @default.
- W2022673856 creator A5084762460 @default.
- W2022673856 date "2014-04-01" @default.
- W2022673856 modified "2023-09-27" @default.
- W2022673856 title "Development of microplasma devices arrays for maskless nanoscale material etching" @default.
- W2022673856 cites W1484959265 @default.
- W2022673856 cites W1970562461 @default.
- W2022673856 cites W1991614017 @default.
- W2022673856 cites W2013183484 @default.
- W2022673856 cites W2100294942 @default.
- W2022673856 cites W2158282557 @default.
- W2022673856 doi "https://doi.org/10.1109/nems.2014.6908826" @default.
- W2022673856 hasPublicationYear "2014" @default.
- W2022673856 type Work @default.
- W2022673856 sameAs 2022673856 @default.
- W2022673856 citedByCount "0" @default.
- W2022673856 crossrefType "proceedings-article" @default.
- W2022673856 hasAuthorship W2022673856A5040985856 @default.
- W2022673856 hasAuthorship W2022673856A5041362389 @default.
- W2022673856 hasAuthorship W2022673856A5050936283 @default.
- W2022673856 hasAuthorship W2022673856A5084762460 @default.
- W2022673856 hasConcept C100460472 @default.
- W2022673856 hasConcept C121332964 @default.
- W2022673856 hasConcept C136525101 @default.
- W2022673856 hasConcept C142724271 @default.
- W2022673856 hasConcept C171250308 @default.
- W2022673856 hasConcept C192562407 @default.
- W2022673856 hasConcept C204787440 @default.
- W2022673856 hasConcept C2779227376 @default.
- W2022673856 hasConcept C37977207 @default.
- W2022673856 hasConcept C45206210 @default.
- W2022673856 hasConcept C49040817 @default.
- W2022673856 hasConcept C527607 @default.
- W2022673856 hasConcept C62520636 @default.
- W2022673856 hasConcept C70420769 @default.
- W2022673856 hasConcept C71924100 @default.
- W2022673856 hasConcept C82706917 @default.
- W2022673856 hasConceptScore W2022673856C100460472 @default.
- W2022673856 hasConceptScore W2022673856C121332964 @default.
- W2022673856 hasConceptScore W2022673856C136525101 @default.
- W2022673856 hasConceptScore W2022673856C142724271 @default.
- W2022673856 hasConceptScore W2022673856C171250308 @default.
- W2022673856 hasConceptScore W2022673856C192562407 @default.
- W2022673856 hasConceptScore W2022673856C204787440 @default.
- W2022673856 hasConceptScore W2022673856C2779227376 @default.
- W2022673856 hasConceptScore W2022673856C37977207 @default.
- W2022673856 hasConceptScore W2022673856C45206210 @default.
- W2022673856 hasConceptScore W2022673856C49040817 @default.
- W2022673856 hasConceptScore W2022673856C527607 @default.
- W2022673856 hasConceptScore W2022673856C62520636 @default.
- W2022673856 hasConceptScore W2022673856C70420769 @default.
- W2022673856 hasConceptScore W2022673856C71924100 @default.
- W2022673856 hasConceptScore W2022673856C82706917 @default.
- W2022673856 hasLocation W20226738561 @default.
- W2022673856 hasOpenAccess W2022673856 @default.
- W2022673856 hasPrimaryLocation W20226738561 @default.
- W2022673856 hasRelatedWork W1493044404 @default.
- W2022673856 hasRelatedWork W1493071716 @default.
- W2022673856 hasRelatedWork W1542130717 @default.
- W2022673856 hasRelatedWork W1554066861 @default.
- W2022673856 hasRelatedWork W1723309415 @default.
- W2022673856 hasRelatedWork W1879865000 @default.
- W2022673856 hasRelatedWork W1987688142 @default.
- W2022673856 hasRelatedWork W2027817270 @default.
- W2022673856 hasRelatedWork W2123266327 @default.
- W2022673856 hasRelatedWork W2254706608 @default.
- W2022673856 hasRelatedWork W2272460246 @default.
- W2022673856 hasRelatedWork W2512909473 @default.
- W2022673856 hasRelatedWork W2532802685 @default.
- W2022673856 hasRelatedWork W2538090084 @default.
- W2022673856 hasRelatedWork W2548450947 @default.
- W2022673856 hasRelatedWork W2593457051 @default.
- W2022673856 hasRelatedWork W2593681101 @default.
- W2022673856 hasRelatedWork W2593752546 @default.
- W2022673856 hasRelatedWork W2996978227 @default.
- W2022673856 hasRelatedWork W2924155911 @default.
- W2022673856 isParatext "false" @default.
- W2022673856 isRetracted "false" @default.
- W2022673856 magId "2022673856" @default.
- W2022673856 workType "article" @default.