Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022677305> ?p ?o ?g. }
- W2022677305 endingPage "218" @default.
- W2022677305 startingPage "215" @default.
- W2022677305 abstract "In this work, new observations noted in the capacitance-voltage (CV) behaviour of polysilicon/oxide/silicon capacitor structures are reported. As the doping concentration in the polysilicon layer is reduced, anomalous CV characteristics are observed, which are not related to depletion into the polysilicon layer. By examination of the temperature and frequency dependence of the CV characteristics, in conjunction with analysis and simulation, it is demonstrated that the anomalous CV behaviour is a result of a high density of near monoenergetic interface states located at the silicon/oxide interface. Furthermore, by an examination of the temperature and time of the final anneal (H2 + N2), a mechanism by which the polysilicon doping level can influence the silicon/oxide interface properties is proposed." @default.
- W2022677305 created "2016-06-24" @default.
- W2022677305 creator A5005056603 @default.
- W2022677305 creator A5016720311 @default.
- W2022677305 creator A5026451363 @default.
- W2022677305 creator A5027408003 @default.
- W2022677305 creator A5032366307 @default.
- W2022677305 creator A5033520589 @default.
- W2022677305 creator A5053550415 @default.
- W2022677305 creator A5058958045 @default.
- W2022677305 creator A5077159537 @default.
- W2022677305 date "1997-06-01" @default.
- W2022677305 modified "2023-09-26" @default.
- W2022677305 title "Impact of the polysilicon doping level on the properties of the silicon/oxide interface in polysilicon/oxide/silicon capacitor structures" @default.
- W2022677305 cites W1964818675 @default.
- W2022677305 cites W1991676338 @default.
- W2022677305 cites W2041502950 @default.
- W2022677305 cites W2053331364 @default.
- W2022677305 cites W2080240036 @default.
- W2022677305 cites W2100003102 @default.
- W2022677305 doi "https://doi.org/10.1016/s0167-9317(97)00051-8" @default.
- W2022677305 hasPublicationYear "1997" @default.
- W2022677305 type Work @default.
- W2022677305 sameAs 2022677305 @default.
- W2022677305 citedByCount "10" @default.
- W2022677305 countsByYear W20226773052013 @default.
- W2022677305 countsByYear W20226773052015 @default.
- W2022677305 crossrefType "journal-article" @default.
- W2022677305 hasAuthorship W2022677305A5005056603 @default.
- W2022677305 hasAuthorship W2022677305A5016720311 @default.
- W2022677305 hasAuthorship W2022677305A5026451363 @default.
- W2022677305 hasAuthorship W2022677305A5027408003 @default.
- W2022677305 hasAuthorship W2022677305A5032366307 @default.
- W2022677305 hasAuthorship W2022677305A5033520589 @default.
- W2022677305 hasAuthorship W2022677305A5053550415 @default.
- W2022677305 hasAuthorship W2022677305A5058958045 @default.
- W2022677305 hasAuthorship W2022677305A5077159537 @default.
- W2022677305 hasConcept C119599485 @default.
- W2022677305 hasConcept C127413603 @default.
- W2022677305 hasConcept C147789679 @default.
- W2022677305 hasConcept C159985019 @default.
- W2022677305 hasConcept C165801399 @default.
- W2022677305 hasConcept C172385210 @default.
- W2022677305 hasConcept C17525397 @default.
- W2022677305 hasConcept C185592680 @default.
- W2022677305 hasConcept C191897082 @default.
- W2022677305 hasConcept C192562407 @default.
- W2022677305 hasConcept C195114451 @default.
- W2022677305 hasConcept C2361726 @default.
- W2022677305 hasConcept C25356406 @default.
- W2022677305 hasConcept C26953177 @default.
- W2022677305 hasConcept C2777431650 @default.
- W2022677305 hasConcept C2779105228 @default.
- W2022677305 hasConcept C2779227376 @default.
- W2022677305 hasConcept C2779851234 @default.
- W2022677305 hasConcept C30066665 @default.
- W2022677305 hasConcept C49040817 @default.
- W2022677305 hasConcept C52192207 @default.
- W2022677305 hasConcept C544956773 @default.
- W2022677305 hasConcept C57863236 @default.
- W2022677305 hasConceptScore W2022677305C119599485 @default.
- W2022677305 hasConceptScore W2022677305C127413603 @default.
- W2022677305 hasConceptScore W2022677305C147789679 @default.
- W2022677305 hasConceptScore W2022677305C159985019 @default.
- W2022677305 hasConceptScore W2022677305C165801399 @default.
- W2022677305 hasConceptScore W2022677305C172385210 @default.
- W2022677305 hasConceptScore W2022677305C17525397 @default.
- W2022677305 hasConceptScore W2022677305C185592680 @default.
- W2022677305 hasConceptScore W2022677305C191897082 @default.
- W2022677305 hasConceptScore W2022677305C192562407 @default.
- W2022677305 hasConceptScore W2022677305C195114451 @default.
- W2022677305 hasConceptScore W2022677305C2361726 @default.
- W2022677305 hasConceptScore W2022677305C25356406 @default.
- W2022677305 hasConceptScore W2022677305C26953177 @default.
- W2022677305 hasConceptScore W2022677305C2777431650 @default.
- W2022677305 hasConceptScore W2022677305C2779105228 @default.
- W2022677305 hasConceptScore W2022677305C2779227376 @default.
- W2022677305 hasConceptScore W2022677305C2779851234 @default.
- W2022677305 hasConceptScore W2022677305C30066665 @default.
- W2022677305 hasConceptScore W2022677305C49040817 @default.
- W2022677305 hasConceptScore W2022677305C52192207 @default.
- W2022677305 hasConceptScore W2022677305C544956773 @default.
- W2022677305 hasConceptScore W2022677305C57863236 @default.
- W2022677305 hasIssue "1-4" @default.
- W2022677305 hasLocation W20226773051 @default.
- W2022677305 hasOpenAccess W2022677305 @default.
- W2022677305 hasPrimaryLocation W20226773051 @default.
- W2022677305 hasRelatedWork W116565484 @default.
- W2022677305 hasRelatedWork W1579895955 @default.
- W2022677305 hasRelatedWork W1981504582 @default.
- W2022677305 hasRelatedWork W2016139587 @default.
- W2022677305 hasRelatedWork W2062522449 @default.
- W2022677305 hasRelatedWork W2076572501 @default.
- W2022677305 hasRelatedWork W2650308085 @default.
- W2022677305 hasRelatedWork W2743194952 @default.
- W2022677305 hasRelatedWork W2760103236 @default.
- W2022677305 hasRelatedWork W4253731651 @default.
- W2022677305 hasVolume "36" @default.