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- W2022697233 abstract "Pattern density multiplication using directed self-assembly (DSA) of block copolymers (BCPs) is a technique capable of producing patterns with small pitches utilizing guiding template patterns printed as larger feature sizes and pitches. One method for achieving this density multiplication is to utilize chemoepitaxy based on a guiding underlayer that is nominally topographically flat but which is composed of a pinning region, or stripe if referring to lamellae, which will chemically prefer one microphase of the BCP, as well as a second region that is often referred to as “neutral” to both phases of the BCP. In most conceptions of such a chemoepitaxial approach for alignment of lamellae patterns, the pinning stripe is typically the width of a single lamellae of the phase separated BCP, while the neutral stripe is some odd number of lamellae widths. In this work, detailed simulation studies have been performed to elucidate the effects of variables such as guiding stripe size, chemical composition of the neutral stripes, and small topography on the process window of DSA pitch sub-division patterning processes. A simple but novel technique has been developed and utilized to quantify the level of alignment of a simulated BCP film to an underlying guiding pattern. Such process windows and lithographic parameters have been studied for different pitch sub-division conditions including 1:3 and 1:5 pinning stripe:neutral stripe width ratios. It is found that the center of the processing window occurs at a composition of the “neutral stripe” such that it is slightly to somewhat strongly preferential to the type of polymer of opposite type to that attracted by the pinning stripe, and that this ideal “neutral stripe” composition becomes more neutral as the density multiplication increases." @default.
- W2022697233 created "2016-06-24" @default.
- W2022697233 creator A5010046244 @default.
- W2022697233 creator A5021218320 @default.
- W2022697233 creator A5033052552 @default.
- W2022697233 creator A5059167082 @default.
- W2022697233 creator A5067051873 @default.
- W2022697233 date "2014-03-28" @default.
- W2022697233 modified "2023-09-23" @default.
- W2022697233 title "Predicting process windows for pattern density multiplication using block copolymer directed self-assembly in conjunction with chemoepitaxial guiding layers" @default.
- W2022697233 cites W1989749884 @default.
- W2022697233 cites W2017213868 @default.
- W2022697233 cites W2027388284 @default.
- W2022697233 cites W2029667189 @default.
- W2022697233 cites W2051738771 @default.
- W2022697233 cites W2078391824 @default.
- W2022697233 cites W2086269990 @default.
- W2022697233 cites W2137643105 @default.
- W2022697233 cites W2314504085 @default.
- W2022697233 doi "https://doi.org/10.1117/12.2046626" @default.
- W2022697233 hasPublicationYear "2014" @default.
- W2022697233 type Work @default.
- W2022697233 sameAs 2022697233 @default.
- W2022697233 citedByCount "1" @default.
- W2022697233 countsByYear W20226972332016 @default.
- W2022697233 crossrefType "proceedings-article" @default.
- W2022697233 hasAuthorship W2022697233A5010046244 @default.
- W2022697233 hasAuthorship W2022697233A5021218320 @default.
- W2022697233 hasAuthorship W2022697233A5033052552 @default.
- W2022697233 hasAuthorship W2022697233A5059167082 @default.
- W2022697233 hasAuthorship W2022697233A5067051873 @default.
- W2022697233 hasConcept C111919701 @default.
- W2022697233 hasConcept C120665830 @default.
- W2022697233 hasConcept C121332964 @default.
- W2022697233 hasConcept C192562407 @default.
- W2022697233 hasConcept C204223013 @default.
- W2022697233 hasConcept C24890656 @default.
- W2022697233 hasConcept C2524010 @default.
- W2022697233 hasConcept C2777210771 @default.
- W2022697233 hasConcept C2777441419 @default.
- W2022697233 hasConcept C2780595030 @default.
- W2022697233 hasConcept C33923547 @default.
- W2022697233 hasConcept C41008148 @default.
- W2022697233 hasConcept C49040817 @default.
- W2022697233 hasConcept C60798267 @default.
- W2022697233 hasConcept C94375191 @default.
- W2022697233 hasConcept C98045186 @default.
- W2022697233 hasConceptScore W2022697233C111919701 @default.
- W2022697233 hasConceptScore W2022697233C120665830 @default.
- W2022697233 hasConceptScore W2022697233C121332964 @default.
- W2022697233 hasConceptScore W2022697233C192562407 @default.
- W2022697233 hasConceptScore W2022697233C204223013 @default.
- W2022697233 hasConceptScore W2022697233C24890656 @default.
- W2022697233 hasConceptScore W2022697233C2524010 @default.
- W2022697233 hasConceptScore W2022697233C2777210771 @default.
- W2022697233 hasConceptScore W2022697233C2777441419 @default.
- W2022697233 hasConceptScore W2022697233C2780595030 @default.
- W2022697233 hasConceptScore W2022697233C33923547 @default.
- W2022697233 hasConceptScore W2022697233C41008148 @default.
- W2022697233 hasConceptScore W2022697233C49040817 @default.
- W2022697233 hasConceptScore W2022697233C60798267 @default.
- W2022697233 hasConceptScore W2022697233C94375191 @default.
- W2022697233 hasConceptScore W2022697233C98045186 @default.
- W2022697233 hasLocation W20226972331 @default.
- W2022697233 hasOpenAccess W2022697233 @default.
- W2022697233 hasPrimaryLocation W20226972331 @default.
- W2022697233 hasRelatedWork W1976886430 @default.
- W2022697233 hasRelatedWork W2000358180 @default.
- W2022697233 hasRelatedWork W2038759377 @default.
- W2022697233 hasRelatedWork W2048861976 @default.
- W2022697233 hasRelatedWork W2051355679 @default.
- W2022697233 hasRelatedWork W2052892784 @default.
- W2022697233 hasRelatedWork W2063343791 @default.
- W2022697233 hasRelatedWork W2092311907 @default.
- W2022697233 hasRelatedWork W2095090051 @default.
- W2022697233 hasRelatedWork W2886205627 @default.
- W2022697233 isParatext "false" @default.
- W2022697233 isRetracted "false" @default.
- W2022697233 magId "2022697233" @default.
- W2022697233 workType "article" @default.