Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022742842> ?p ?o ?g. }
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- W2022742842 endingPage "2150" @default.
- W2022742842 startingPage "2146" @default.
- W2022742842 abstract "Infrared absorption bands of localized vibrational modes for ion-implanted Si in GaAs are observed. Room-temperature implants were at energies of 1.0 and 1.5 MeV and fluences ∼ 1017 ions cm−2. The bands previously attributed to SiGa and SiAs defects were observed and the dependence of the absorption at liquid-nitrogen temperature was studied for samples isochronally annealed from 200 to 900 °C. The strongest band due to (SiGa–SiAs) pairs was observed after 400 °C annealing. For most of the temperature range the different defect concentrations were found to either grow or show little change during the annealing cycle. However, between ∼ 500 and 650 °C substantial reverse annealing was observed for both SiGa and SiAs. This effect cannot be explained by direct pair formation and other possible explanations are suggested. For these high-fluence, high-energy implants the electrical data obtained during the anneal cycle show no apparent correlation with the Si defect concentrations as deduced from optical data. The conductivity is probably controlled by residual damage left in the implant layer." @default.
- W2022742842 created "2016-06-24" @default.
- W2022742842 creator A5001377799 @default.
- W2022742842 creator A5017684152 @default.
- W2022742842 creator A5017838568 @default.
- W2022742842 creator A5083847503 @default.
- W2022742842 creator A5091693207 @default.
- W2022742842 date "1972-05-01" @default.
- W2022742842 modified "2023-10-16" @default.
- W2022742842 title "Localized Vibrational Mode Absorption of Ion-Implanted Silicon in GaAs" @default.
- W2022742842 cites W1963904673 @default.
- W2022742842 cites W1966321891 @default.
- W2022742842 cites W1985401209 @default.
- W2022742842 cites W1989881491 @default.
- W2022742842 cites W1991209668 @default.
- W2022742842 cites W2003117192 @default.
- W2022742842 cites W2029385517 @default.
- W2022742842 cites W2038661101 @default.
- W2022742842 cites W2040544996 @default.
- W2022742842 cites W2044332380 @default.
- W2022742842 cites W2055470808 @default.
- W2022742842 cites W2059081369 @default.
- W2022742842 cites W2062003973 @default.
- W2022742842 cites W2063318143 @default.
- W2022742842 cites W2063709149 @default.
- W2022742842 doi "https://doi.org/10.1063/1.1661465" @default.
- W2022742842 hasPublicationYear "1972" @default.
- W2022742842 type Work @default.
- W2022742842 sameAs 2022742842 @default.
- W2022742842 citedByCount "37" @default.
- W2022742842 countsByYear W20227428422015 @default.
- W2022742842 crossrefType "journal-article" @default.
- W2022742842 hasAuthorship W2022742842A5001377799 @default.
- W2022742842 hasAuthorship W2022742842A5017684152 @default.
- W2022742842 hasAuthorship W2022742842A5017838568 @default.
- W2022742842 hasAuthorship W2022742842A5083847503 @default.
- W2022742842 hasAuthorship W2022742842A5091693207 @default.
- W2022742842 hasConcept C113196181 @default.
- W2022742842 hasConcept C120665830 @default.
- W2022742842 hasConcept C121332964 @default.
- W2022742842 hasConcept C125287762 @default.
- W2022742842 hasConcept C145148216 @default.
- W2022742842 hasConcept C153294291 @default.
- W2022742842 hasConcept C153642686 @default.
- W2022742842 hasConcept C158355884 @default.
- W2022742842 hasConcept C159985019 @default.
- W2022742842 hasConcept C178790620 @default.
- W2022742842 hasConcept C185592680 @default.
- W2022742842 hasConcept C192562407 @default.
- W2022742842 hasConcept C22078206 @default.
- W2022742842 hasConcept C2777855556 @default.
- W2022742842 hasConcept C39353612 @default.
- W2022742842 hasConcept C41823505 @default.
- W2022742842 hasConcept C43617362 @default.
- W2022742842 hasConcept C49040817 @default.
- W2022742842 hasConcept C544956773 @default.
- W2022742842 hasConceptScore W2022742842C113196181 @default.
- W2022742842 hasConceptScore W2022742842C120665830 @default.
- W2022742842 hasConceptScore W2022742842C121332964 @default.
- W2022742842 hasConceptScore W2022742842C125287762 @default.
- W2022742842 hasConceptScore W2022742842C145148216 @default.
- W2022742842 hasConceptScore W2022742842C153294291 @default.
- W2022742842 hasConceptScore W2022742842C153642686 @default.
- W2022742842 hasConceptScore W2022742842C158355884 @default.
- W2022742842 hasConceptScore W2022742842C159985019 @default.
- W2022742842 hasConceptScore W2022742842C178790620 @default.
- W2022742842 hasConceptScore W2022742842C185592680 @default.
- W2022742842 hasConceptScore W2022742842C192562407 @default.
- W2022742842 hasConceptScore W2022742842C22078206 @default.
- W2022742842 hasConceptScore W2022742842C2777855556 @default.
- W2022742842 hasConceptScore W2022742842C39353612 @default.
- W2022742842 hasConceptScore W2022742842C41823505 @default.
- W2022742842 hasConceptScore W2022742842C43617362 @default.
- W2022742842 hasConceptScore W2022742842C49040817 @default.
- W2022742842 hasConceptScore W2022742842C544956773 @default.
- W2022742842 hasIssue "5" @default.
- W2022742842 hasLocation W20227428421 @default.
- W2022742842 hasOpenAccess W2022742842 @default.
- W2022742842 hasPrimaryLocation W20227428421 @default.
- W2022742842 hasRelatedWork W1616992653 @default.
- W2022742842 hasRelatedWork W2031170839 @default.
- W2022742842 hasRelatedWork W2042925312 @default.
- W2022742842 hasRelatedWork W2048269824 @default.
- W2022742842 hasRelatedWork W2048867833 @default.
- W2022742842 hasRelatedWork W2061540418 @default.
- W2022742842 hasRelatedWork W2065258228 @default.
- W2022742842 hasRelatedWork W2065669148 @default.
- W2022742842 hasRelatedWork W2275386326 @default.
- W2022742842 hasRelatedWork W3101130858 @default.
- W2022742842 hasVolume "43" @default.
- W2022742842 isParatext "false" @default.
- W2022742842 isRetracted "false" @default.
- W2022742842 magId "2022742842" @default.
- W2022742842 workType "article" @default.