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- W2022744056 abstract "Pattern projection is an important application area of diffractive optics, comprising microlithography and laser materials processing. We discuss differences in performance and requirements between pattern projection with conventional imaging optics and with diffractive optics." @default.
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- W2022744056 date "1994-10-12" @default.
- W2022744056 modified "2023-09-23" @default.
- W2022744056 title "<title>Pattern projection by conventional or diffractive optics: a comparison</title>" @default.
- W2022744056 doi "https://doi.org/10.1117/12.190211" @default.
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