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- W2022751477 abstract "When the frequency, pulse width, the beam profile, and energy density of the laser were controlled, then irradiated onto the silicon wafer with a beam of 15μm diameter or less, we observed that convex dot with a height of 100-300 nano- meters was formed. [1] The laser energy density through which the convex dot was formed was below 3.8J/cm<sup>2</sup>. In the semiconductor excitation laser, the pulse width was 40nsec-150nsec; the wavelength was 532 nm. [2]We developed equipment by using convex dots that was able to form 2D minute code of 16x16 dots in 100μm x100μm area in each IC chip on the silicon wafer without particle generation ." @default.
- W2022751477 created "2016-06-24" @default.
- W2022751477 creator A5024782814 @default.
- W2022751477 creator A5028689209 @default.
- W2022751477 creator A5067952928 @default.
- W2022751477 date "2009-02-12" @default.
- W2022751477 modified "2023-09-26" @default.
- W2022751477 title "Micro ID marking for semiconductor chips: recent progress and future prospects" @default.
- W2022751477 doi "https://doi.org/10.1117/12.808503" @default.
- W2022751477 hasPublicationYear "2009" @default.
- W2022751477 type Work @default.
- W2022751477 sameAs 2022751477 @default.
- W2022751477 citedByCount "1" @default.
- W2022751477 crossrefType "proceedings-article" @default.
- W2022751477 hasAuthorship W2022751477A5024782814 @default.
- W2022751477 hasAuthorship W2022751477A5028689209 @default.
- W2022751477 hasAuthorship W2022751477A5067952928 @default.
- W2022751477 hasConcept C108225325 @default.
- W2022751477 hasConcept C120665830 @default.
- W2022751477 hasConcept C121332964 @default.
- W2022751477 hasConcept C160671074 @default.
- W2022751477 hasConcept C192562407 @default.
- W2022751477 hasConcept C49040817 @default.
- W2022751477 hasConcept C520434653 @default.
- W2022751477 hasConcept C544956773 @default.
- W2022751477 hasConcept C62520636 @default.
- W2022751477 hasConcept C6260449 @default.
- W2022751477 hasConcept C83581075 @default.
- W2022751477 hasConceptScore W2022751477C108225325 @default.
- W2022751477 hasConceptScore W2022751477C120665830 @default.
- W2022751477 hasConceptScore W2022751477C121332964 @default.
- W2022751477 hasConceptScore W2022751477C160671074 @default.
- W2022751477 hasConceptScore W2022751477C192562407 @default.
- W2022751477 hasConceptScore W2022751477C49040817 @default.
- W2022751477 hasConceptScore W2022751477C520434653 @default.
- W2022751477 hasConceptScore W2022751477C544956773 @default.
- W2022751477 hasConceptScore W2022751477C62520636 @default.
- W2022751477 hasConceptScore W2022751477C6260449 @default.
- W2022751477 hasConceptScore W2022751477C83581075 @default.
- W2022751477 hasLocation W20227514771 @default.
- W2022751477 hasOpenAccess W2022751477 @default.
- W2022751477 hasPrimaryLocation W20227514771 @default.
- W2022751477 hasRelatedWork W1992476100 @default.
- W2022751477 hasRelatedWork W2010481829 @default.
- W2022751477 hasRelatedWork W2015838393 @default.
- W2022751477 hasRelatedWork W2046703922 @default.
- W2022751477 hasRelatedWork W2081367125 @default.
- W2022751477 hasRelatedWork W2111385852 @default.
- W2022751477 hasRelatedWork W2144745738 @default.
- W2022751477 hasRelatedWork W2314841554 @default.
- W2022751477 hasRelatedWork W3134027146 @default.
- W2022751477 hasRelatedWork W762019970 @default.
- W2022751477 isParatext "false" @default.
- W2022751477 isRetracted "false" @default.
- W2022751477 magId "2022751477" @default.
- W2022751477 workType "article" @default.