Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022760090> ?p ?o ?g. }
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67
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- W2022760090 endingPage "133" @default.
- W2022760090 startingPage "128" @default.
- W2022760090 abstract "Abstract The detection threshold for analysis of Al in silicon on sapphire (SOS) and bulk Si by secondary ion mass spectrometry (SIMS) has been reduced to 10 14 Al atoms cm -3 by a new sample preparation method combined with a technique for reducing the mass 27 background in the spectrometer. The application of a photoresist layer prior to SOS sample subdivision reduces surface contamination by sapphire particles. In situ coating of the immersion lens cover plate of the CAMECA IMS-3f instrument with pure Si immediately before a SIMS analysis reduces the instrumental mass 27 background to below 10 14 cm -3 ." @default.
- W2022760090 created "2016-06-24" @default.
- W2022760090 creator A5023980645 @default.
- W2022760090 creator A5028449021 @default.
- W2022760090 creator A5036295864 @default.
- W2022760090 creator A5030474950 @default.
- W2022760090 date "1982-11-01" @default.
- W2022760090 modified "2023-09-24" @default.
- W2022760090 title "Analysis of Al in silicon on sapphire films and bulk silicon" @default.
- W2022760090 cites W1970260020 @default.
- W2022760090 cites W1974927548 @default.
- W2022760090 cites W2015284410 @default.
- W2022760090 cites W2032085234 @default.
- W2022760090 cites W2046959188 @default.
- W2022760090 cites W2073271966 @default.
- W2022760090 cites W2094364276 @default.
- W2022760090 cites W2135209094 @default.
- W2022760090 cites W2155387513 @default.
- W2022760090 doi "https://doi.org/10.1016/0378-5963(82)90047-2" @default.
- W2022760090 hasPublicationYear "1982" @default.
- W2022760090 type Work @default.
- W2022760090 sameAs 2022760090 @default.
- W2022760090 citedByCount "11" @default.
- W2022760090 crossrefType "journal-article" @default.
- W2022760090 hasAuthorship W2022760090A5023980645 @default.
- W2022760090 hasAuthorship W2022760090A5028449021 @default.
- W2022760090 hasAuthorship W2022760090A5030474950 @default.
- W2022760090 hasAuthorship W2022760090A5036295864 @default.
- W2022760090 hasConcept C120665830 @default.
- W2022760090 hasConcept C121332964 @default.
- W2022760090 hasConcept C172905872 @default.
- W2022760090 hasConcept C192562407 @default.
- W2022760090 hasConcept C2780064504 @default.
- W2022760090 hasConcept C49040817 @default.
- W2022760090 hasConcept C520434653 @default.
- W2022760090 hasConcept C53143962 @default.
- W2022760090 hasConcept C544956773 @default.
- W2022760090 hasConceptScore W2022760090C120665830 @default.
- W2022760090 hasConceptScore W2022760090C121332964 @default.
- W2022760090 hasConceptScore W2022760090C172905872 @default.
- W2022760090 hasConceptScore W2022760090C192562407 @default.
- W2022760090 hasConceptScore W2022760090C2780064504 @default.
- W2022760090 hasConceptScore W2022760090C49040817 @default.
- W2022760090 hasConceptScore W2022760090C520434653 @default.
- W2022760090 hasConceptScore W2022760090C53143962 @default.
- W2022760090 hasConceptScore W2022760090C544956773 @default.
- W2022760090 hasIssue "1" @default.
- W2022760090 hasLocation W20227600901 @default.
- W2022760090 hasOpenAccess W2022760090 @default.
- W2022760090 hasPrimaryLocation W20227600901 @default.
- W2022760090 hasRelatedWork W1966768421 @default.
- W2022760090 hasRelatedWork W1971089334 @default.
- W2022760090 hasRelatedWork W1999880806 @default.
- W2022760090 hasRelatedWork W2003039218 @default.
- W2022760090 hasRelatedWork W2021073372 @default.
- W2022760090 hasRelatedWork W2082847262 @default.
- W2022760090 hasRelatedWork W2088357963 @default.
- W2022760090 hasRelatedWork W2145114226 @default.
- W2022760090 hasRelatedWork W2372919917 @default.
- W2022760090 hasRelatedWork W1992573939 @default.
- W2022760090 hasVolume "14" @default.
- W2022760090 isParatext "false" @default.
- W2022760090 isRetracted "false" @default.
- W2022760090 magId "2022760090" @default.
- W2022760090 workType "article" @default.