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- W2022760970 abstract "We have studied the lithography issue of resist footing in an ion implant layer after a gate conductor formation. In a previous report , we proposed the shadow model and showed a solution to reduce the resist footing. This paper reports on the further investigation into the cause and the reduction method of the resist footing over non-planar wafer with simulation and explains the effects with the shadow model. We analyzed the processes that affected the resist footing and four main effects were selected. These were NA, illumination coherency, mask bias, and mask type. We simulated these four effects on an orthogonal array by using the design of experiments (DOE). We obtained a better condition of higher NA, smaller coherency, positive mask bias, and Att-PSM for reducing the resist footing. We explain the reasons for these effective factors with the shadow model." @default.
- W2022760970 created "2016-06-24" @default.
- W2022760970 creator A5017861176 @default.
- W2022760970 creator A5032454861 @default.
- W2022760970 creator A5039286507 @default.
- W2022760970 creator A5045932804 @default.
- W2022760970 creator A5056809621 @default.
- W2022760970 date "2004-05-28" @default.
- W2022760970 modified "2023-09-23" @default.
- W2022760970 title "Approach for reducing resist footing over nonplanar wafer" @default.
- W2022760970 doi "https://doi.org/10.1117/12.536108" @default.
- W2022760970 hasPublicationYear "2004" @default.
- W2022760970 type Work @default.
- W2022760970 sameAs 2022760970 @default.
- W2022760970 citedByCount "2" @default.
- W2022760970 crossrefType "proceedings-article" @default.
- W2022760970 hasAuthorship W2022760970A5017861176 @default.
- W2022760970 hasAuthorship W2022760970A5032454861 @default.
- W2022760970 hasAuthorship W2022760970A5039286507 @default.
- W2022760970 hasAuthorship W2022760970A5045932804 @default.
- W2022760970 hasAuthorship W2022760970A5056809621 @default.
- W2022760970 hasConcept C111335779 @default.
- W2022760970 hasConcept C117797892 @default.
- W2022760970 hasConcept C120665830 @default.
- W2022760970 hasConcept C121332964 @default.
- W2022760970 hasConcept C121684516 @default.
- W2022760970 hasConcept C134786449 @default.
- W2022760970 hasConcept C15744967 @default.
- W2022760970 hasConcept C160671074 @default.
- W2022760970 hasConcept C171250308 @default.
- W2022760970 hasConcept C192562407 @default.
- W2022760970 hasConcept C200274948 @default.
- W2022760970 hasConcept C204223013 @default.
- W2022760970 hasConcept C2524010 @default.
- W2022760970 hasConcept C2776326872 @default.
- W2022760970 hasConcept C2779227376 @default.
- W2022760970 hasConcept C33923547 @default.
- W2022760970 hasConcept C41008148 @default.
- W2022760970 hasConcept C49040817 @default.
- W2022760970 hasConcept C53524968 @default.
- W2022760970 hasConcept C542102704 @default.
- W2022760970 hasConceptScore W2022760970C111335779 @default.
- W2022760970 hasConceptScore W2022760970C117797892 @default.
- W2022760970 hasConceptScore W2022760970C120665830 @default.
- W2022760970 hasConceptScore W2022760970C121332964 @default.
- W2022760970 hasConceptScore W2022760970C121684516 @default.
- W2022760970 hasConceptScore W2022760970C134786449 @default.
- W2022760970 hasConceptScore W2022760970C15744967 @default.
- W2022760970 hasConceptScore W2022760970C160671074 @default.
- W2022760970 hasConceptScore W2022760970C171250308 @default.
- W2022760970 hasConceptScore W2022760970C192562407 @default.
- W2022760970 hasConceptScore W2022760970C200274948 @default.
- W2022760970 hasConceptScore W2022760970C204223013 @default.
- W2022760970 hasConceptScore W2022760970C2524010 @default.
- W2022760970 hasConceptScore W2022760970C2776326872 @default.
- W2022760970 hasConceptScore W2022760970C2779227376 @default.
- W2022760970 hasConceptScore W2022760970C33923547 @default.
- W2022760970 hasConceptScore W2022760970C41008148 @default.
- W2022760970 hasConceptScore W2022760970C49040817 @default.
- W2022760970 hasConceptScore W2022760970C53524968 @default.
- W2022760970 hasConceptScore W2022760970C542102704 @default.
- W2022760970 hasLocation W20227609701 @default.
- W2022760970 hasOpenAccess W2022760970 @default.
- W2022760970 hasPrimaryLocation W20227609701 @default.
- W2022760970 hasRelatedWork W1981850693 @default.
- W2022760970 hasRelatedWork W1987282460 @default.
- W2022760970 hasRelatedWork W1992419143 @default.
- W2022760970 hasRelatedWork W2008491785 @default.
- W2022760970 hasRelatedWork W2011417707 @default.
- W2022760970 hasRelatedWork W2045370251 @default.
- W2022760970 hasRelatedWork W2046589587 @default.
- W2022760970 hasRelatedWork W2065191965 @default.
- W2022760970 hasRelatedWork W2117105486 @default.
- W2022760970 hasRelatedWork W4249668346 @default.
- W2022760970 isParatext "false" @default.
- W2022760970 isRetracted "false" @default.
- W2022760970 magId "2022760970" @default.
- W2022760970 workType "article" @default.