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• W2022762449 abstract "We report the generation of sub-surface nanouidic channels from single crystal diamond. To make the channels, we used a combination of ion-beam induced damage and annealing to create a buried, etchable graphitic layer in the diamond. Either laser or focussed ion-beam milling was then used to connect to that layer, and subsequent electro-chemical etching used to remove the graphitic material. The channels had dimensions 100-200 nm thick, 100 μm wide and 300 μm long, which have a total volume around 3 pL; and were around 3 μm below the diamond surface." @default.
• W2022762449 created "2016-06-24" @default.
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• W2022762449 date "2013-12-20" @default.
• W2022762449 modified "2023-09-27" @default.
• W2022762449 title "Buried picolitre fluidic channels in single-crystal diamond" @default.
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• W2022762449 doi "https://doi.org/10.1117/12.2035099" @default.
• W2022762449 hasPublicationYear "2013" @default.
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