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- W2022779685 abstract "In this work, Pt/AlN/Sapphire SAW resonator operating in 2.45GHz ISM band is studied as a potential sensor for high temperature and high frequency applications. Experimental characterization was realized using a specific station probe between room temperature and 500°C. Results show that electromechanical factor of the structure (K <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> ) increase with temperature, while the quality factor decreases. The variation of frequency with temperature shows a good linearity, which is very useful for temperature sensor applications and the measured TCF of -35 ppm/°C is consisting with modeling predictions." @default.
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- W2022779685 date "2013-07-01" @default.
- W2022779685 modified "2023-10-14" @default.
- W2022779685 title "Platinum/AlN/Sapphire SAW resonator operating in GHz range for high temperature wireless SAW sensor" @default.
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- W2022779685 doi "https://doi.org/10.1109/ultsym.2013.0277" @default.
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