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- W2022781714 abstract "Abstract In this paper a linear control scheme for a close-spaced vapor transport process to obtain thin film semiconductors is presented. This linear control scheme is composed of two linear control laws. The inner controller is an implicit control law whose aim is to transform the system into a linear time-invariant system without disturbances. The outer controller is a classical PI control law, whose aim is to make the error tend towards zero." @default.
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- W2022781714 date "2000-05-01" @default.
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- W2022781714 title "Implicit linear control law of a close-spaced vapor transport process" @default.
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- W2022781714 doi "https://doi.org/10.1016/s0967-0661(99)00175-6" @default.
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