Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022783875> ?p ?o ?g. }
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- W2022783875 endingPage "208" @default.
- W2022783875 startingPage "205" @default.
- W2022783875 abstract "It is known that fabrication of shallow silicide-to-silicon contacts is possible by diluting the silicide-forming metal with some other metal which does not participate in silicide formation at the chosen annealing temperature. We report preliminary experiments undertaken to develop contacts which are even shallower, by a modification of this method. The diluting metal is replaced by Si which supplies a portion of the Si needed in silicide formation. An amorphous alloy of ∼400-Å Pd80Si20, coevaporated onto a Si single crystal substrate, has been successfully used to form a continuous and uniform layer of Pd2Si which only consumes ∼80Å of substrate silicon. The formation and microstructural properties of the formed silicide has been studied by in situ transmission electron microscopy experiments. These results were correlated with parallel measurements of the current-voltage characteristics of Schottky diodes made from the same material. It is shown that annealing for ∼ 1/4 h at 200 °C is sufficient to form the desired Pd2Si." @default.
- W2022783875 created "2016-06-24" @default.
- W2022783875 creator A5008799141 @default.
- W2022783875 creator A5061216998 @default.
- W2022783875 date "1980-07-15" @default.
- W2022783875 modified "2023-10-16" @default.
- W2022783875 title "Shallow silicide‐to‐silicon contacts: The case of amorphous‐Pd<sub>80</sub>Si<sub>20</sub>–to–silicon" @default.
- W2022783875 cites W1972986761 @default.
- W2022783875 cites W1985696469 @default.
- W2022783875 cites W1987479864 @default.
- W2022783875 cites W2020851022 @default.
- W2022783875 cites W2027358184 @default.
- W2022783875 cites W2029752456 @default.
- W2022783875 cites W2071846242 @default.
- W2022783875 doi "https://doi.org/10.1063/1.91826" @default.
- W2022783875 hasPublicationYear "1980" @default.
- W2022783875 type Work @default.
- W2022783875 sameAs 2022783875 @default.
- W2022783875 citedByCount "11" @default.
- W2022783875 crossrefType "journal-article" @default.
- W2022783875 hasAuthorship W2022783875A5008799141 @default.
- W2022783875 hasAuthorship W2022783875A5061216998 @default.
- W2022783875 hasConcept C111368507 @default.
- W2022783875 hasConcept C127313418 @default.
- W2022783875 hasConcept C136525101 @default.
- W2022783875 hasConcept C142724271 @default.
- W2022783875 hasConcept C146088050 @default.
- W2022783875 hasConcept C171250308 @default.
- W2022783875 hasConcept C185592680 @default.
- W2022783875 hasConcept C191897082 @default.
- W2022783875 hasConcept C192562407 @default.
- W2022783875 hasConcept C204787440 @default.
- W2022783875 hasConcept C205200001 @default.
- W2022783875 hasConcept C2776390347 @default.
- W2022783875 hasConcept C2777289219 @default.
- W2022783875 hasConcept C2777855556 @default.
- W2022783875 hasConcept C2779667780 @default.
- W2022783875 hasConcept C2780901251 @default.
- W2022783875 hasConcept C49040817 @default.
- W2022783875 hasConcept C544956773 @default.
- W2022783875 hasConcept C56052488 @default.
- W2022783875 hasConcept C71924100 @default.
- W2022783875 hasConcept C78434282 @default.
- W2022783875 hasConcept C8010536 @default.
- W2022783875 hasConceptScore W2022783875C111368507 @default.
- W2022783875 hasConceptScore W2022783875C127313418 @default.
- W2022783875 hasConceptScore W2022783875C136525101 @default.
- W2022783875 hasConceptScore W2022783875C142724271 @default.
- W2022783875 hasConceptScore W2022783875C146088050 @default.
- W2022783875 hasConceptScore W2022783875C171250308 @default.
- W2022783875 hasConceptScore W2022783875C185592680 @default.
- W2022783875 hasConceptScore W2022783875C191897082 @default.
- W2022783875 hasConceptScore W2022783875C192562407 @default.
- W2022783875 hasConceptScore W2022783875C204787440 @default.
- W2022783875 hasConceptScore W2022783875C205200001 @default.
- W2022783875 hasConceptScore W2022783875C2776390347 @default.
- W2022783875 hasConceptScore W2022783875C2777289219 @default.
- W2022783875 hasConceptScore W2022783875C2777855556 @default.
- W2022783875 hasConceptScore W2022783875C2779667780 @default.
- W2022783875 hasConceptScore W2022783875C2780901251 @default.
- W2022783875 hasConceptScore W2022783875C49040817 @default.
- W2022783875 hasConceptScore W2022783875C544956773 @default.
- W2022783875 hasConceptScore W2022783875C56052488 @default.
- W2022783875 hasConceptScore W2022783875C71924100 @default.
- W2022783875 hasConceptScore W2022783875C78434282 @default.
- W2022783875 hasConceptScore W2022783875C8010536 @default.
- W2022783875 hasIssue "2" @default.
- W2022783875 hasLocation W20227838751 @default.
- W2022783875 hasOpenAccess W2022783875 @default.
- W2022783875 hasPrimaryLocation W20227838751 @default.
- W2022783875 hasRelatedWork W1485660136 @default.
- W2022783875 hasRelatedWork W1966714478 @default.
- W2022783875 hasRelatedWork W1978228868 @default.
- W2022783875 hasRelatedWork W1985880972 @default.
- W2022783875 hasRelatedWork W2022783875 @default.
- W2022783875 hasRelatedWork W2041833038 @default.
- W2022783875 hasRelatedWork W2089633568 @default.
- W2022783875 hasRelatedWork W2094667597 @default.
- W2022783875 hasRelatedWork W2129859591 @default.
- W2022783875 hasRelatedWork W8408043 @default.
- W2022783875 hasVolume "37" @default.
- W2022783875 isParatext "false" @default.
- W2022783875 isRetracted "false" @default.
- W2022783875 magId "2022783875" @default.
- W2022783875 workType "article" @default.