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- W2022793661 abstract "Directly photopatternable interfaces are introduced that facilitate two-dimensional spatial control of block copolymer (BCP) orientation in thin films. Copolymers containing an acid labile monomer were synthesized, formulated with a photoacid generator (PAG), and coated to create grafted surface treatments (GSTs). These as-cast GST films are either inherently neutral or preferential (but not both) to lamella-forming poly(styrene-block-trimethylsilylstyrene) (PS-b-PTMSS). Subsequent contact printing and baking produced GSTs with submicron chemically patterned gratings. The catalytic reaction of the photoacid generated in the UV-exposed regions of the GSTs changed the interfacial interactions between the BCP and the GST in one of two ways: from neutral to preferential (N2P) or preferential to neutral (P2N). When PS-b-PTMSS was thermally annealed between a chemically patterned GST and a top coat, alternating regions of perpendicular and parallel BCP lamellae were formed." @default.
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- W2022793661 date "2014-08-07" @default.
- W2022793661 modified "2023-10-09" @default.
- W2022793661 title "Photopatternable Interfaces for Block Copolymer Lithography" @default.
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- W2022793661 doi "https://doi.org/10.1021/mz500370r" @default.
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