Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022794284> ?p ?o ?g. }
- W2022794284 endingPage "065043" @default.
- W2022794284 startingPage "065043" @default.
- W2022794284 abstract "Hall currents generated in circular planar magnetrons can induce magnetic fields of several mT when operating in high power impulse magnetron sputtering (HiPIMS) mode. Near the target surface, the induced magnetic field is negligible compared to the static one. However, as we move away from the target surface the induced field becomes comparable or even stronger than the static field. In this paper, we investigate the induced magnetic field using Hall sensors, which can directly measure the effective magnetic field (the sum of the static and the induced magnetic fields) and with sufficient time resolution to observe the temporal evolution of the induced field during the HiPIMS pulse. We present the 2D temporal evolution of an induced magnetic field, showing its influence on the effective field. Based on the 2D induced magnetic field map, we calculate numerically the spatial distribution of the Hall currents generating the field, resulting in a current density up to 7 A cm−2. We present these results for both an unbalanced and balanced magnetron configuration." @default.
- W2022794284 created "2016-06-24" @default.
- W2022794284 creator A5006616714 @default.
- W2022794284 creator A5011629300 @default.
- W2022794284 creator A5042005671 @default.
- W2022794284 creator A5052069641 @default.
- W2022794284 creator A5090334616 @default.
- W2022794284 date "2014-10-27" @default.
- W2022794284 modified "2023-10-18" @default.
- W2022794284 title "Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges" @default.
- W2022794284 cites W1626800832 @default.
- W2022794284 cites W1967861543 @default.
- W2022794284 cites W1972426939 @default.
- W2022794284 cites W1980899127 @default.
- W2022794284 cites W1983269298 @default.
- W2022794284 cites W1985423992 @default.
- W2022794284 cites W2009661921 @default.
- W2022794284 cites W2010137617 @default.
- W2022794284 cites W2011007597 @default.
- W2022794284 cites W2012176666 @default.
- W2022794284 cites W2020867183 @default.
- W2022794284 cites W2027839237 @default.
- W2022794284 cites W2033098126 @default.
- W2022794284 cites W2051944828 @default.
- W2022794284 cites W2054310995 @default.
- W2022794284 cites W2058601284 @default.
- W2022794284 cites W2059144383 @default.
- W2022794284 cites W2062300915 @default.
- W2022794284 cites W2074156584 @default.
- W2022794284 cites W2079902137 @default.
- W2022794284 cites W2084210225 @default.
- W2022794284 cites W2084808659 @default.
- W2022794284 cites W2090071143 @default.
- W2022794284 cites W2094491269 @default.
- W2022794284 cites W2135089014 @default.
- W2022794284 cites W2142063750 @default.
- W2022794284 cites W2143845821 @default.
- W2022794284 cites W2145872827 @default.
- W2022794284 cites W2149716719 @default.
- W2022794284 cites W3104938560 @default.
- W2022794284 cites W3104996039 @default.
- W2022794284 doi "https://doi.org/10.1088/0963-0252/23/6/065043" @default.
- W2022794284 hasPublicationYear "2014" @default.
- W2022794284 type Work @default.
- W2022794284 sameAs 2022794284 @default.
- W2022794284 citedByCount "8" @default.
- W2022794284 countsByYear W20227942842014 @default.
- W2022794284 countsByYear W20227942842016 @default.
- W2022794284 countsByYear W20227942842017 @default.
- W2022794284 countsByYear W20227942842018 @default.
- W2022794284 countsByYear W20227942842020 @default.
- W2022794284 crossrefType "journal-article" @default.
- W2022794284 hasAuthorship W2022794284A5006616714 @default.
- W2022794284 hasAuthorship W2022794284A5011629300 @default.
- W2022794284 hasAuthorship W2022794284A5042005671 @default.
- W2022794284 hasAuthorship W2022794284A5052069641 @default.
- W2022794284 hasAuthorship W2022794284A5090334616 @default.
- W2022794284 hasConcept C113196181 @default.
- W2022794284 hasConcept C121332964 @default.
- W2022794284 hasConcept C123408415 @default.
- W2022794284 hasConcept C171250308 @default.
- W2022794284 hasConcept C184779094 @default.
- W2022794284 hasConcept C185592680 @default.
- W2022794284 hasConcept C19067145 @default.
- W2022794284 hasConcept C192562407 @default.
- W2022794284 hasConcept C22423302 @default.
- W2022794284 hasConcept C2780841128 @default.
- W2022794284 hasConcept C43617362 @default.
- W2022794284 hasConcept C46141821 @default.
- W2022794284 hasConcept C49040817 @default.
- W2022794284 hasConcept C61427134 @default.
- W2022794284 hasConcept C70836080 @default.
- W2022794284 hasConcept C74650414 @default.
- W2022794284 hasConcept C97892325 @default.
- W2022794284 hasConceptScore W2022794284C113196181 @default.
- W2022794284 hasConceptScore W2022794284C121332964 @default.
- W2022794284 hasConceptScore W2022794284C123408415 @default.
- W2022794284 hasConceptScore W2022794284C171250308 @default.
- W2022794284 hasConceptScore W2022794284C184779094 @default.
- W2022794284 hasConceptScore W2022794284C185592680 @default.
- W2022794284 hasConceptScore W2022794284C19067145 @default.
- W2022794284 hasConceptScore W2022794284C192562407 @default.
- W2022794284 hasConceptScore W2022794284C22423302 @default.
- W2022794284 hasConceptScore W2022794284C2780841128 @default.
- W2022794284 hasConceptScore W2022794284C43617362 @default.
- W2022794284 hasConceptScore W2022794284C46141821 @default.
- W2022794284 hasConceptScore W2022794284C49040817 @default.
- W2022794284 hasConceptScore W2022794284C61427134 @default.
- W2022794284 hasConceptScore W2022794284C70836080 @default.
- W2022794284 hasConceptScore W2022794284C74650414 @default.
- W2022794284 hasConceptScore W2022794284C97892325 @default.
- W2022794284 hasIssue "6" @default.
- W2022794284 hasLocation W20227942841 @default.
- W2022794284 hasOpenAccess W2022794284 @default.
- W2022794284 hasPrimaryLocation W20227942841 @default.
- W2022794284 hasRelatedWork W2022760403 @default.
- W2022794284 hasRelatedWork W2035877064 @default.
- W2022794284 hasRelatedWork W2051394489 @default.