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- W2022809297 abstract "The reactive ion etching of AlInGaP and GaAs with a gas mixture of SiCl4, CH4, and Ar is examined. Process parameters such as gas flow composition and radio-frequency power input are varied. The CH4 flow variation in particular has a substantial effect on the morphology of AlInGaP, while generally the effects on GaAs are less dramatic. The etch rates of AlInGaP and GaAs show similar trends. A suitable etching process was found and applied to an AlInGaP/InGaP index-guided 675 nm laser structure." @default.
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- W2022809297 title "Reactive ion etching of AlInGaP and GaAs in SiCl4/CH4/Ar-based plasmas" @default.
- W2022809297 doi "https://doi.org/10.1116/1.587034" @default.
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