Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022821110> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2022821110 endingPage "3129" @default.
- W2022821110 startingPage "3123" @default.
- W2022821110 abstract "A systematic study of Au/Zn/Au ohmic contacts to Be‐implanted p‐type by rapid thermal alloying is presented. The processing conditions, such as zinc composition and temperature‐time cycle, are optimized. For the peak hole concentration, about , contact resistivity as low as is obtained. The microstructure of the contact is investigated using SEM, EDXA, AES, and XRD measurements in order to explore the correlation of the structural information with electrical characteristics represented by contact resistivity. It is found that during alloying, the layer near the interface is decomposed due to Ga and As outdiffusion, enhanced by Au interdiffusion. Ga diffuses to the contact surface in a much larger extent than As does. The interaction of Au and Ga, which produces phase, plays a key role in the formation of alloyed ohmic contacts to . The rapid thermal processing technique provides better control of Au‐Ga reaction, as well as limited dissolution of the surface, which makes the optimum ohmic contact possible. The present work has demonstrated that rapid thermal alloying offers obvious advantages over the conventional furnace alloying process, including lower contact resistivity, better interface morphology by limiting interfacial liquid phase reaction, and controlled shallow penetration depth." @default.
- W2022821110 created "2016-06-24" @default.
- W2022821110 creator A5050363291 @default.
- W2022821110 creator A5055217752 @default.
- W2022821110 creator A5083054612 @default.
- W2022821110 date "1989-10-01" @default.
- W2022821110 modified "2023-09-23" @default.
- W2022821110 title "Rapid Thermal Alloyed Ohmic Contacts to p‐Type GaAs" @default.
- W2022821110 doi "https://doi.org/10.1149/1.2096412" @default.
- W2022821110 hasPublicationYear "1989" @default.
- W2022821110 type Work @default.
- W2022821110 sameAs 2022821110 @default.
- W2022821110 citedByCount "12" @default.
- W2022821110 countsByYear W20228211102013 @default.
- W2022821110 countsByYear W20228211102015 @default.
- W2022821110 countsByYear W20228211102019 @default.
- W2022821110 countsByYear W20228211102021 @default.
- W2022821110 crossrefType "journal-article" @default.
- W2022821110 hasAuthorship W2022821110A5050363291 @default.
- W2022821110 hasAuthorship W2022821110A5055217752 @default.
- W2022821110 hasAuthorship W2022821110A5083054612 @default.
- W2022821110 hasConcept C113196181 @default.
- W2022821110 hasConcept C119599485 @default.
- W2022821110 hasConcept C121332964 @default.
- W2022821110 hasConcept C127413603 @default.
- W2022821110 hasConcept C132235601 @default.
- W2022821110 hasConcept C138230450 @default.
- W2022821110 hasConcept C159985019 @default.
- W2022821110 hasConcept C178790620 @default.
- W2022821110 hasConcept C185592680 @default.
- W2022821110 hasConcept C191897082 @default.
- W2022821110 hasConcept C192562407 @default.
- W2022821110 hasConcept C204530211 @default.
- W2022821110 hasConcept C2779227376 @default.
- W2022821110 hasConcept C33373654 @default.
- W2022821110 hasConcept C42360764 @default.
- W2022821110 hasConcept C43617362 @default.
- W2022821110 hasConcept C44280652 @default.
- W2022821110 hasConcept C69990965 @default.
- W2022821110 hasConcept C87976508 @default.
- W2022821110 hasConcept C88380143 @default.
- W2022821110 hasConcept C97355855 @default.
- W2022821110 hasConceptScore W2022821110C113196181 @default.
- W2022821110 hasConceptScore W2022821110C119599485 @default.
- W2022821110 hasConceptScore W2022821110C121332964 @default.
- W2022821110 hasConceptScore W2022821110C127413603 @default.
- W2022821110 hasConceptScore W2022821110C132235601 @default.
- W2022821110 hasConceptScore W2022821110C138230450 @default.
- W2022821110 hasConceptScore W2022821110C159985019 @default.
- W2022821110 hasConceptScore W2022821110C178790620 @default.
- W2022821110 hasConceptScore W2022821110C185592680 @default.
- W2022821110 hasConceptScore W2022821110C191897082 @default.
- W2022821110 hasConceptScore W2022821110C192562407 @default.
- W2022821110 hasConceptScore W2022821110C204530211 @default.
- W2022821110 hasConceptScore W2022821110C2779227376 @default.
- W2022821110 hasConceptScore W2022821110C33373654 @default.
- W2022821110 hasConceptScore W2022821110C42360764 @default.
- W2022821110 hasConceptScore W2022821110C43617362 @default.
- W2022821110 hasConceptScore W2022821110C44280652 @default.
- W2022821110 hasConceptScore W2022821110C69990965 @default.
- W2022821110 hasConceptScore W2022821110C87976508 @default.
- W2022821110 hasConceptScore W2022821110C88380143 @default.
- W2022821110 hasConceptScore W2022821110C97355855 @default.
- W2022821110 hasIssue "10" @default.
- W2022821110 hasLocation W20228211101 @default.
- W2022821110 hasOpenAccess W2022821110 @default.
- W2022821110 hasPrimaryLocation W20228211101 @default.
- W2022821110 hasRelatedWork W150843855 @default.
- W2022821110 hasRelatedWork W2011794728 @default.
- W2022821110 hasRelatedWork W2020660716 @default.
- W2022821110 hasRelatedWork W2058945371 @default.
- W2022821110 hasRelatedWork W2126473095 @default.
- W2022821110 hasRelatedWork W2351679394 @default.
- W2022821110 hasRelatedWork W2483054628 @default.
- W2022821110 hasRelatedWork W2511021840 @default.
- W2022821110 hasRelatedWork W2777121569 @default.
- W2022821110 hasRelatedWork W3157307459 @default.
- W2022821110 hasVolume "136" @default.
- W2022821110 isParatext "false" @default.
- W2022821110 isRetracted "false" @default.
- W2022821110 magId "2022821110" @default.
- W2022821110 workType "article" @default.