Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022832080> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2022832080 endingPage "348" @default.
- W2022832080 startingPage "343" @default.
- W2022832080 abstract "The material and dielectric properties of SiO2 aerogel thin films were studied. These films were fabricated by spin coating and a subsequent supercritical drying method. Film porosity was evaluated as 67% with Rutherford backscattering spectrometry and its dielectric constant was measured to be 2.15 using metal/insulator/semiconductor structure. Dielectric constant of SiO2 aerogel was sensitive to the surface coverage and we could obtain a lower dielectric constant, 2.07 with thermal dehydration at 450°C. This value was one of the lowest among intermetal dielectric materials ever reported." @default.
- W2022832080 created "2016-06-24" @default.
- W2022832080 creator A5006409052 @default.
- W2022832080 creator A5015673562 @default.
- W2022832080 creator A5051614630 @default.
- W2022832080 creator A5057097670 @default.
- W2022832080 creator A5059359624 @default.
- W2022832080 date "1997-01-01" @default.
- W2022832080 modified "2023-09-27" @default.
- W2022832080 title "Evaluation of SiO2 aerogel thin film with ultra low dielectric constant as an intermetal dielectric" @default.
- W2022832080 cites W2000965870 @default.
- W2022832080 cites W2033008263 @default.
- W2022832080 cites W2122838892 @default.
- W2022832080 doi "https://doi.org/10.1016/s0167-9317(96)00063-9" @default.
- W2022832080 hasPublicationYear "1997" @default.
- W2022832080 type Work @default.
- W2022832080 sameAs 2022832080 @default.
- W2022832080 citedByCount "37" @default.
- W2022832080 countsByYear W20228320802013 @default.
- W2022832080 countsByYear W20228320802014 @default.
- W2022832080 countsByYear W20228320802016 @default.
- W2022832080 countsByYear W20228320802018 @default.
- W2022832080 countsByYear W20228320802019 @default.
- W2022832080 countsByYear W20228320802021 @default.
- W2022832080 countsByYear W20228320802022 @default.
- W2022832080 countsByYear W20228320802023 @default.
- W2022832080 crossrefType "journal-article" @default.
- W2022832080 hasAuthorship W2022832080A5006409052 @default.
- W2022832080 hasAuthorship W2022832080A5015673562 @default.
- W2022832080 hasAuthorship W2022832080A5051614630 @default.
- W2022832080 hasAuthorship W2022832080A5057097670 @default.
- W2022832080 hasAuthorship W2022832080A5059359624 @default.
- W2022832080 hasConcept C115196108 @default.
- W2022832080 hasConcept C118419359 @default.
- W2022832080 hasConcept C133386390 @default.
- W2022832080 hasConcept C159985019 @default.
- W2022832080 hasConcept C168651791 @default.
- W2022832080 hasConcept C171250308 @default.
- W2022832080 hasConcept C178790620 @default.
- W2022832080 hasConcept C185592680 @default.
- W2022832080 hasConcept C19067145 @default.
- W2022832080 hasConcept C192562407 @default.
- W2022832080 hasConcept C2779866884 @default.
- W2022832080 hasConcept C2780012831 @default.
- W2022832080 hasConcept C2781448156 @default.
- W2022832080 hasConcept C49040817 @default.
- W2022832080 hasConcept C6648577 @default.
- W2022832080 hasConceptScore W2022832080C115196108 @default.
- W2022832080 hasConceptScore W2022832080C118419359 @default.
- W2022832080 hasConceptScore W2022832080C133386390 @default.
- W2022832080 hasConceptScore W2022832080C159985019 @default.
- W2022832080 hasConceptScore W2022832080C168651791 @default.
- W2022832080 hasConceptScore W2022832080C171250308 @default.
- W2022832080 hasConceptScore W2022832080C178790620 @default.
- W2022832080 hasConceptScore W2022832080C185592680 @default.
- W2022832080 hasConceptScore W2022832080C19067145 @default.
- W2022832080 hasConceptScore W2022832080C192562407 @default.
- W2022832080 hasConceptScore W2022832080C2779866884 @default.
- W2022832080 hasConceptScore W2022832080C2780012831 @default.
- W2022832080 hasConceptScore W2022832080C2781448156 @default.
- W2022832080 hasConceptScore W2022832080C49040817 @default.
- W2022832080 hasConceptScore W2022832080C6648577 @default.
- W2022832080 hasIssue "1-4" @default.
- W2022832080 hasLocation W20228320801 @default.
- W2022832080 hasOpenAccess W2022832080 @default.
- W2022832080 hasPrimaryLocation W20228320801 @default.
- W2022832080 hasRelatedWork W1994753809 @default.
- W2022832080 hasRelatedWork W2021714583 @default.
- W2022832080 hasRelatedWork W2022832080 @default.
- W2022832080 hasRelatedWork W2042938713 @default.
- W2022832080 hasRelatedWork W2043673973 @default.
- W2022832080 hasRelatedWork W2075580692 @default.
- W2022832080 hasRelatedWork W2379321951 @default.
- W2022832080 hasRelatedWork W2793446430 @default.
- W2022832080 hasRelatedWork W2979821306 @default.
- W2022832080 hasRelatedWork W4292265357 @default.
- W2022832080 hasVolume "33" @default.
- W2022832080 isParatext "false" @default.
- W2022832080 isRetracted "false" @default.
- W2022832080 magId "2022832080" @default.
- W2022832080 workType "article" @default.