Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022832500> ?p ?o ?g. }
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- W2022832500 endingPage "931" @default.
- W2022832500 startingPage "931" @default.
- W2022832500 abstract "The effects of plasma-enhanced chemical vapor deposition (PE-CVD) silicon nitride (p-SiN) passivation films on time dependent dielectric breakdown (TDDB) of gate oxide were studied. It was found that degradation of TDDB characteristics with p-SiN films was suppressed by the change in p-SiN deposition conditions. The correlation between trapped electron density and TDDB characteristics varied, depending on the p-SiN films. The degradation of TDDB characteristics was also enhanced with phosphosilicate glass (PSG) under the p-SiN passivation film." @default.
- W2022832500 created "2016-06-24" @default.
- W2022832500 creator A5029531350 @default.
- W2022832500 creator A5035919607 @default.
- W2022832500 creator A5043442535 @default.
- W2022832500 creator A5045257897 @default.
- W2022832500 date "2004-03-01" @default.
- W2022832500 modified "2023-09-27" @default.
- W2022832500 title "Degradation of Gate Oxide Reliability due to Plasma-Deposited Silicon Nitride" @default.
- W2022832500 cites W2048049771 @default.
- W2022832500 cites W2065765234 @default.
- W2022832500 cites W2085394554 @default.
- W2022832500 cites W2576962131 @default.
- W2022832500 doi "https://doi.org/10.1143/jjap.43.931" @default.
- W2022832500 hasPublicationYear "2004" @default.
- W2022832500 type Work @default.
- W2022832500 sameAs 2022832500 @default.
- W2022832500 citedByCount "0" @default.
- W2022832500 crossrefType "journal-article" @default.
- W2022832500 hasAuthorship W2022832500A5029531350 @default.
- W2022832500 hasAuthorship W2022832500A5035919607 @default.
- W2022832500 hasAuthorship W2022832500A5043442535 @default.
- W2022832500 hasAuthorship W2022832500A5045257897 @default.
- W2022832500 hasConcept C113196181 @default.
- W2022832500 hasConcept C119599485 @default.
- W2022832500 hasConcept C127413603 @default.
- W2022832500 hasConcept C133386390 @default.
- W2022832500 hasConcept C151730666 @default.
- W2022832500 hasConcept C152909973 @default.
- W2022832500 hasConcept C159985019 @default.
- W2022832500 hasConcept C165801399 @default.
- W2022832500 hasConcept C172385210 @default.
- W2022832500 hasConcept C185592680 @default.
- W2022832500 hasConcept C191897082 @default.
- W2022832500 hasConcept C192562407 @default.
- W2022832500 hasConcept C2361726 @default.
- W2022832500 hasConcept C24326235 @default.
- W2022832500 hasConcept C2777431650 @default.
- W2022832500 hasConcept C2779227376 @default.
- W2022832500 hasConcept C2779679103 @default.
- W2022832500 hasConcept C2779851234 @default.
- W2022832500 hasConcept C2816523 @default.
- W2022832500 hasConcept C33574316 @default.
- W2022832500 hasConcept C38347018 @default.
- W2022832500 hasConcept C43617362 @default.
- W2022832500 hasConcept C49040817 @default.
- W2022832500 hasConcept C544956773 @default.
- W2022832500 hasConcept C57410435 @default.
- W2022832500 hasConcept C64297162 @default.
- W2022832500 hasConcept C70401718 @default.
- W2022832500 hasConcept C86803240 @default.
- W2022832500 hasConceptScore W2022832500C113196181 @default.
- W2022832500 hasConceptScore W2022832500C119599485 @default.
- W2022832500 hasConceptScore W2022832500C127413603 @default.
- W2022832500 hasConceptScore W2022832500C133386390 @default.
- W2022832500 hasConceptScore W2022832500C151730666 @default.
- W2022832500 hasConceptScore W2022832500C152909973 @default.
- W2022832500 hasConceptScore W2022832500C159985019 @default.
- W2022832500 hasConceptScore W2022832500C165801399 @default.
- W2022832500 hasConceptScore W2022832500C172385210 @default.
- W2022832500 hasConceptScore W2022832500C185592680 @default.
- W2022832500 hasConceptScore W2022832500C191897082 @default.
- W2022832500 hasConceptScore W2022832500C192562407 @default.
- W2022832500 hasConceptScore W2022832500C2361726 @default.
- W2022832500 hasConceptScore W2022832500C24326235 @default.
- W2022832500 hasConceptScore W2022832500C2777431650 @default.
- W2022832500 hasConceptScore W2022832500C2779227376 @default.
- W2022832500 hasConceptScore W2022832500C2779679103 @default.
- W2022832500 hasConceptScore W2022832500C2779851234 @default.
- W2022832500 hasConceptScore W2022832500C2816523 @default.
- W2022832500 hasConceptScore W2022832500C33574316 @default.
- W2022832500 hasConceptScore W2022832500C38347018 @default.
- W2022832500 hasConceptScore W2022832500C43617362 @default.
- W2022832500 hasConceptScore W2022832500C49040817 @default.
- W2022832500 hasConceptScore W2022832500C544956773 @default.
- W2022832500 hasConceptScore W2022832500C57410435 @default.
- W2022832500 hasConceptScore W2022832500C64297162 @default.
- W2022832500 hasConceptScore W2022832500C70401718 @default.
- W2022832500 hasConceptScore W2022832500C86803240 @default.
- W2022832500 hasIssue "3R" @default.
- W2022832500 hasLocation W20228325001 @default.
- W2022832500 hasOpenAccess W2022832500 @default.
- W2022832500 hasPrimaryLocation W20228325001 @default.
- W2022832500 hasRelatedWork W1516866780 @default.
- W2022832500 hasRelatedWork W1918746582 @default.
- W2022832500 hasRelatedWork W1984109273 @default.
- W2022832500 hasRelatedWork W2010380945 @default.
- W2022832500 hasRelatedWork W2022832500 @default.
- W2022832500 hasRelatedWork W2045479671 @default.
- W2022832500 hasRelatedWork W2064759087 @default.
- W2022832500 hasRelatedWork W2539595190 @default.
- W2022832500 hasRelatedWork W2783566751 @default.
- W2022832500 hasRelatedWork W4229016249 @default.
- W2022832500 hasVolume "43" @default.
- W2022832500 isParatext "false" @default.
- W2022832500 isRetracted "false" @default.
- W2022832500 magId "2022832500" @default.
- W2022832500 workType "article" @default.