Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022846771> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W2022846771 abstract "Non-contact, 3D optical interferometric profilers provide detailed topography measurements of super-smooth surfaces such as hard disk substrates and super-polished optics. However, the contribution of the interferometer system to the measurement can be significant for surfaces with an RMS roughness of one Angstrom and below. Special care must be taken to minimize random noise as well as to remove the systematic instrument error from the measured data. While the random noise can be addressed by low-noise design and averaging of measurements, the systematic instrument error is more difficult to eliminate. In this paper an interferometer configuration is presented that eliminates the mid to higher spatial frequencies from the reference beam. This configuration is called a virtual-reference interferometer, since there is no physical surface in focus conjugate to the test surface. This provides very smooth systematic instrument errors with essentially no contribution in the mid to high spatial frequencies of surface waviness and roughness. The virtual-reference interferometer has a midsize measurement area of 20x20 mm, is fully compensated for white light, extended source illumination, and enables data acquisition for both phase shifting and coherence scanning modes. Current performance data show a residual systematic tool waviness error of < 0.2 Angstrom RMS, with potential for improvement. Efficient stitching of subaperture measurements accommodates high resolution roughness and waviness maps of test surfaces up to 150 mm x100 mm." @default.
- W2022846771 created "2016-06-24" @default.
- W2022846771 creator A5048579456 @default.
- W2022846771 date "2012-09-13" @default.
- W2022846771 modified "2023-09-26" @default.
- W2022846771 title "Sub-angstrom surface metrology with a virtual reference interferometer" @default.
- W2022846771 cites W1968669654 @default.
- W2022846771 cites W1986688891 @default.
- W2022846771 cites W2058929179 @default.
- W2022846771 cites W1553802528 @default.
- W2022846771 cites W1595251087 @default.
- W2022846771 doi "https://doi.org/10.1117/12.928975" @default.
- W2022846771 hasPublicationYear "2012" @default.
- W2022846771 type Work @default.
- W2022846771 sameAs 2022846771 @default.
- W2022846771 citedByCount "5" @default.
- W2022846771 countsByYear W20228467712014 @default.
- W2022846771 countsByYear W20228467712015 @default.
- W2022846771 countsByYear W20228467712023 @default.
- W2022846771 crossrefType "proceedings-article" @default.
- W2022846771 hasAuthorship W2022846771A5048579456 @default.
- W2022846771 hasConcept C107365816 @default.
- W2022846771 hasConcept C115961682 @default.
- W2022846771 hasConcept C120665830 @default.
- W2022846771 hasConcept C121332964 @default.
- W2022846771 hasConcept C154945302 @default.
- W2022846771 hasConcept C159074562 @default.
- W2022846771 hasConcept C159985019 @default.
- W2022846771 hasConcept C166689943 @default.
- W2022846771 hasConcept C192562407 @default.
- W2022846771 hasConcept C195766429 @default.
- W2022846771 hasConcept C23576306 @default.
- W2022846771 hasConcept C2777701225 @default.
- W2022846771 hasConcept C29081049 @default.
- W2022846771 hasConcept C41008148 @default.
- W2022846771 hasConcept C71039073 @default.
- W2022846771 hasConcept C99498987 @default.
- W2022846771 hasConceptScore W2022846771C107365816 @default.
- W2022846771 hasConceptScore W2022846771C115961682 @default.
- W2022846771 hasConceptScore W2022846771C120665830 @default.
- W2022846771 hasConceptScore W2022846771C121332964 @default.
- W2022846771 hasConceptScore W2022846771C154945302 @default.
- W2022846771 hasConceptScore W2022846771C159074562 @default.
- W2022846771 hasConceptScore W2022846771C159985019 @default.
- W2022846771 hasConceptScore W2022846771C166689943 @default.
- W2022846771 hasConceptScore W2022846771C192562407 @default.
- W2022846771 hasConceptScore W2022846771C195766429 @default.
- W2022846771 hasConceptScore W2022846771C23576306 @default.
- W2022846771 hasConceptScore W2022846771C2777701225 @default.
- W2022846771 hasConceptScore W2022846771C29081049 @default.
- W2022846771 hasConceptScore W2022846771C41008148 @default.
- W2022846771 hasConceptScore W2022846771C71039073 @default.
- W2022846771 hasConceptScore W2022846771C99498987 @default.
- W2022846771 hasLocation W20228467711 @default.
- W2022846771 hasOpenAccess W2022846771 @default.
- W2022846771 hasPrimaryLocation W20228467711 @default.
- W2022846771 hasRelatedWork W1969384341 @default.
- W2022846771 hasRelatedWork W1977004139 @default.
- W2022846771 hasRelatedWork W1982674708 @default.
- W2022846771 hasRelatedWork W1991272549 @default.
- W2022846771 hasRelatedWork W2022846771 @default.
- W2022846771 hasRelatedWork W2039110568 @default.
- W2022846771 hasRelatedWork W2064726292 @default.
- W2022846771 hasRelatedWork W2566157531 @default.
- W2022846771 hasRelatedWork W3080242109 @default.
- W2022846771 hasRelatedWork W3186331605 @default.
- W2022846771 isParatext "false" @default.
- W2022846771 isRetracted "false" @default.
- W2022846771 magId "2022846771" @default.
- W2022846771 workType "article" @default.