Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022883325> ?p ?o ?g. }
Showing items 1 to 56 of
56
with 100 items per page.
- W2022883325 endingPage "L99" @default.
- W2022883325 startingPage "L97" @default.
- W2022883325 abstract "We have carried out the annealing of InN epilayers grown by molecular beam epitaxy and capped with in situ deposited SiNx in vacuum at 450–650°C. With the increase in annealing temperature, the crystallinity and carrier mobility of the InN layer clearly improved, and the residual carrier concentration of the layer decreased. Annealing without the SiNx capping layer increased the number of defects and carrier concentration, probably due to the formation of N vacancies and O incorporation." @default.
- W2022883325 created "2016-06-24" @default.
- W2022883325 creator A5003312798 @default.
- W2022883325 creator A5028689028 @default.
- W2022883325 creator A5053869611 @default.
- W2022883325 creator A5076238325 @default.
- W2022883325 creator A5076591854 @default.
- W2022883325 date "2003-12-26" @default.
- W2022883325 modified "2023-09-30" @default.
- W2022883325 title "Improved Electrical Properties of InN by High-Temperature Annealing withIn SituCapped SiNxLayers" @default.
- W2022883325 cites W2002325102 @default.
- W2022883325 cites W2031467416 @default.
- W2022883325 cites W2059442265 @default.
- W2022883325 doi "https://doi.org/10.1143/jjap.43.l97" @default.
- W2022883325 hasPublicationYear "2003" @default.
- W2022883325 type Work @default.
- W2022883325 sameAs 2022883325 @default.
- W2022883325 citedByCount "7" @default.
- W2022883325 countsByYear W20228833252014 @default.
- W2022883325 countsByYear W20228833252015 @default.
- W2022883325 countsByYear W20228833252017 @default.
- W2022883325 crossrefType "journal-article" @default.
- W2022883325 hasAuthorship W2022883325A5003312798 @default.
- W2022883325 hasAuthorship W2022883325A5028689028 @default.
- W2022883325 hasAuthorship W2022883325A5053869611 @default.
- W2022883325 hasAuthorship W2022883325A5076238325 @default.
- W2022883325 hasAuthorship W2022883325A5076591854 @default.
- W2022883325 hasConcept C159985019 @default.
- W2022883325 hasConcept C192562407 @default.
- W2022883325 hasConcept C2777855556 @default.
- W2022883325 hasConcept C49040817 @default.
- W2022883325 hasConceptScore W2022883325C159985019 @default.
- W2022883325 hasConceptScore W2022883325C192562407 @default.
- W2022883325 hasConceptScore W2022883325C2777855556 @default.
- W2022883325 hasConceptScore W2022883325C49040817 @default.
- W2022883325 hasIssue "1A/B" @default.
- W2022883325 hasLocation W20228833251 @default.
- W2022883325 hasOpenAccess W2022883325 @default.
- W2022883325 hasPrimaryLocation W20228833251 @default.
- W2022883325 hasRelatedWork W2027044219 @default.
- W2022883325 hasRelatedWork W2029717347 @default.
- W2022883325 hasRelatedWork W2039703849 @default.
- W2022883325 hasRelatedWork W2324807869 @default.
- W2022883325 hasRelatedWork W2347531304 @default.
- W2022883325 hasRelatedWork W2529907530 @default.
- W2022883325 hasRelatedWork W2558617580 @default.
- W2022883325 hasRelatedWork W3138096539 @default.
- W2022883325 hasRelatedWork W3196600710 @default.
- W2022883325 hasRelatedWork W4205510562 @default.
- W2022883325 hasVolume "43" @default.
- W2022883325 isParatext "false" @default.
- W2022883325 isRetracted "false" @default.
- W2022883325 magId "2022883325" @default.
- W2022883325 workType "article" @default.