Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022889764> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2022889764 endingPage "2502" @default.
- W2022889764 startingPage "2499" @default.
- W2022889764 abstract "The addition of a small amount of oxygen to the CH4 and H2 feed gas supports the diamond growth during hot filament assisted chemical vapor deposition (HFCVD) even at a substrate temperature below 500 °C. Here we present AFM, SEM, SIMS, X-ray diffraction, Raman scattering, optical transmittance spectra, PDS and temperature resolved resistivity measurements of thin B-doped CVD diamond layers deposited on silicon, fused silica and borosilicate glass at low substrate temperatures. The Raman peak 1332 cm–1 for diamond layers on silicon shifts towards lower (higher) values for layers deposited on fused silica (borosilicate glass) indicating a significant tensile (compressive) stress in diamond films deposited on amorphous substrates. Diamond films grown at low temperature are very smooth (the surface roughness below 10 nm) and they are optically transparent for photon energies up to 6 eV. However, they are highly resistive despite a relatively high B concentration in plasma during growth. (© 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
- W2022889764 created "2016-06-24" @default.
- W2022889764 creator A5010001316 @default.
- W2022889764 creator A5028079885 @default.
- W2022889764 creator A5041953568 @default.
- W2022889764 creator A5048347363 @default.
- W2022889764 creator A5060698976 @default.
- W2022889764 creator A5072983642 @default.
- W2022889764 date "2004-09-01" @default.
- W2022889764 modified "2023-10-18" @default.
- W2022889764 title "Structural, optical and electrical properties of nanodiamond films deposited by HFCVD on borosilicate glass, fused silica and silicon at low temperature" @default.
- W2022889764 doi "https://doi.org/10.1002/pssa.200405174" @default.
- W2022889764 hasPublicationYear "2004" @default.
- W2022889764 type Work @default.
- W2022889764 sameAs 2022889764 @default.
- W2022889764 citedByCount "12" @default.
- W2022889764 countsByYear W20228897642013 @default.
- W2022889764 countsByYear W20228897642017 @default.
- W2022889764 countsByYear W20228897642018 @default.
- W2022889764 countsByYear W20228897642019 @default.
- W2022889764 countsByYear W20228897642020 @default.
- W2022889764 countsByYear W20228897642022 @default.
- W2022889764 crossrefType "journal-article" @default.
- W2022889764 hasAuthorship W2022889764A5010001316 @default.
- W2022889764 hasAuthorship W2022889764A5028079885 @default.
- W2022889764 hasAuthorship W2022889764A5041953568 @default.
- W2022889764 hasAuthorship W2022889764A5048347363 @default.
- W2022889764 hasAuthorship W2022889764A5060698976 @default.
- W2022889764 hasAuthorship W2022889764A5072983642 @default.
- W2022889764 hasBestOaLocation W20228897641 @default.
- W2022889764 hasConcept C111368507 @default.
- W2022889764 hasConcept C120665830 @default.
- W2022889764 hasConcept C121332964 @default.
- W2022889764 hasConcept C127313418 @default.
- W2022889764 hasConcept C159985019 @default.
- W2022889764 hasConcept C185592680 @default.
- W2022889764 hasConcept C192562407 @default.
- W2022889764 hasConcept C206802598 @default.
- W2022889764 hasConcept C2776921476 @default.
- W2022889764 hasConcept C2777289219 @default.
- W2022889764 hasConcept C40003534 @default.
- W2022889764 hasConcept C49040817 @default.
- W2022889764 hasConcept C544956773 @default.
- W2022889764 hasConcept C56052488 @default.
- W2022889764 hasConcept C57410435 @default.
- W2022889764 hasConcept C8010536 @default.
- W2022889764 hasConceptScore W2022889764C111368507 @default.
- W2022889764 hasConceptScore W2022889764C120665830 @default.
- W2022889764 hasConceptScore W2022889764C121332964 @default.
- W2022889764 hasConceptScore W2022889764C127313418 @default.
- W2022889764 hasConceptScore W2022889764C159985019 @default.
- W2022889764 hasConceptScore W2022889764C185592680 @default.
- W2022889764 hasConceptScore W2022889764C192562407 @default.
- W2022889764 hasConceptScore W2022889764C206802598 @default.
- W2022889764 hasConceptScore W2022889764C2776921476 @default.
- W2022889764 hasConceptScore W2022889764C2777289219 @default.
- W2022889764 hasConceptScore W2022889764C40003534 @default.
- W2022889764 hasConceptScore W2022889764C49040817 @default.
- W2022889764 hasConceptScore W2022889764C544956773 @default.
- W2022889764 hasConceptScore W2022889764C56052488 @default.
- W2022889764 hasConceptScore W2022889764C57410435 @default.
- W2022889764 hasConceptScore W2022889764C8010536 @default.
- W2022889764 hasIssue "11" @default.
- W2022889764 hasLocation W20228897641 @default.
- W2022889764 hasOpenAccess W2022889764 @default.
- W2022889764 hasPrimaryLocation W20228897641 @default.
- W2022889764 hasRelatedWork W1983739557 @default.
- W2022889764 hasRelatedWork W1985945765 @default.
- W2022889764 hasRelatedWork W2008336847 @default.
- W2022889764 hasRelatedWork W2024543091 @default.
- W2022889764 hasRelatedWork W2037497935 @default.
- W2022889764 hasRelatedWork W2050787848 @default.
- W2022889764 hasRelatedWork W2055471957 @default.
- W2022889764 hasRelatedWork W2111767692 @default.
- W2022889764 hasRelatedWork W2126974341 @default.
- W2022889764 hasRelatedWork W2377113584 @default.
- W2022889764 hasVolume "201" @default.
- W2022889764 isParatext "false" @default.
- W2022889764 isRetracted "false" @default.
- W2022889764 magId "2022889764" @default.
- W2022889764 workType "article" @default.