Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022891475> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2022891475 endingPage "093301" @default.
- W2022891475 startingPage "093301" @default.
- W2022891475 abstract "Electron energy distribution functions (EEDFs) of low pressure O2 plasma were measured by adding small amount of coil power in a capacitive discharge. When the plasma was generated by bias power only, the measured EEDF showed a bi-Maxwellian distribution. However, when a very small coil power (a few Watts) was added, the EEDF evolved abruptly into a Maxwellian distribution, while the electron density was decreased. In an Ar/O2 mixture discharge, this EEDF evolution to the Maxwellian was also observed at a relatively higher coil power. This abrupt change in EEDFs with a very small coil power appears to be attributed to a combined effect of collisionless heating by capacitive and induced electric fields." @default.
- W2022891475 created "2016-06-24" @default.
- W2022891475 creator A5048415067 @default.
- W2022891475 creator A5057494416 @default.
- W2022891475 creator A5074901895 @default.
- W2022891475 date "2012-05-01" @default.
- W2022891475 modified "2023-09-26" @default.
- W2022891475 title "Effect of adding small amount of inductive fields to O2, Ar/O2 capacitively coupled plasmas" @default.
- W2022891475 cites W1978549767 @default.
- W2022891475 cites W1983478870 @default.
- W2022891475 cites W1986149124 @default.
- W2022891475 cites W1992776083 @default.
- W2022891475 cites W1993361798 @default.
- W2022891475 cites W2021117071 @default.
- W2022891475 cites W2030727454 @default.
- W2022891475 cites W2051212212 @default.
- W2022891475 cites W2054988970 @default.
- W2022891475 cites W2057571491 @default.
- W2022891475 cites W2057800155 @default.
- W2022891475 cites W2059168091 @default.
- W2022891475 cites W2061139552 @default.
- W2022891475 cites W2069422190 @default.
- W2022891475 cites W2084517727 @default.
- W2022891475 cites W2089724599 @default.
- W2022891475 cites W2090910147 @default.
- W2022891475 cites W2157733749 @default.
- W2022891475 cites W2168144843 @default.
- W2022891475 doi "https://doi.org/10.1063/1.4705362" @default.
- W2022891475 hasPublicationYear "2012" @default.
- W2022891475 type Work @default.
- W2022891475 sameAs 2022891475 @default.
- W2022891475 citedByCount "8" @default.
- W2022891475 countsByYear W20228914752013 @default.
- W2022891475 countsByYear W20228914752014 @default.
- W2022891475 countsByYear W20228914752015 @default.
- W2022891475 countsByYear W20228914752017 @default.
- W2022891475 crossrefType "journal-article" @default.
- W2022891475 hasAuthorship W2022891475A5048415067 @default.
- W2022891475 hasAuthorship W2022891475A5057494416 @default.
- W2022891475 hasAuthorship W2022891475A5074901895 @default.
- W2022891475 hasConcept C119599485 @default.
- W2022891475 hasConcept C121332964 @default.
- W2022891475 hasConcept C127413603 @default.
- W2022891475 hasConcept C184779094 @default.
- W2022891475 hasConcept C185544564 @default.
- W2022891475 hasConcept C185592680 @default.
- W2022891475 hasConcept C192039680 @default.
- W2022891475 hasConcept C192562407 @default.
- W2022891475 hasConcept C206755178 @default.
- W2022891475 hasConcept C30403606 @default.
- W2022891475 hasConcept C60799052 @default.
- W2022891475 hasConcept C62520636 @default.
- W2022891475 hasConcept C68687820 @default.
- W2022891475 hasConcept C82706917 @default.
- W2022891475 hasConcept C95974651 @default.
- W2022891475 hasConceptScore W2022891475C119599485 @default.
- W2022891475 hasConceptScore W2022891475C121332964 @default.
- W2022891475 hasConceptScore W2022891475C127413603 @default.
- W2022891475 hasConceptScore W2022891475C184779094 @default.
- W2022891475 hasConceptScore W2022891475C185544564 @default.
- W2022891475 hasConceptScore W2022891475C185592680 @default.
- W2022891475 hasConceptScore W2022891475C192039680 @default.
- W2022891475 hasConceptScore W2022891475C192562407 @default.
- W2022891475 hasConceptScore W2022891475C206755178 @default.
- W2022891475 hasConceptScore W2022891475C30403606 @default.
- W2022891475 hasConceptScore W2022891475C60799052 @default.
- W2022891475 hasConceptScore W2022891475C62520636 @default.
- W2022891475 hasConceptScore W2022891475C68687820 @default.
- W2022891475 hasConceptScore W2022891475C82706917 @default.
- W2022891475 hasConceptScore W2022891475C95974651 @default.
- W2022891475 hasIssue "9" @default.
- W2022891475 hasLocation W20228914751 @default.
- W2022891475 hasOpenAccess W2022891475 @default.
- W2022891475 hasPrimaryLocation W20228914751 @default.
- W2022891475 hasRelatedWork W1972436815 @default.
- W2022891475 hasRelatedWork W2022891475 @default.
- W2022891475 hasRelatedWork W2076721238 @default.
- W2022891475 hasRelatedWork W2096652337 @default.
- W2022891475 hasRelatedWork W2524929352 @default.
- W2022891475 hasRelatedWork W2790125938 @default.
- W2022891475 hasRelatedWork W2797239496 @default.
- W2022891475 hasRelatedWork W2900008585 @default.
- W2022891475 hasRelatedWork W4312175791 @default.
- W2022891475 hasRelatedWork W4313886467 @default.
- W2022891475 hasVolume "111" @default.
- W2022891475 isParatext "false" @default.
- W2022891475 isRetracted "false" @default.
- W2022891475 magId "2022891475" @default.
- W2022891475 workType "article" @default.