FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022892725> ?p ?o ?g. }

• W2022892725 endingPage "065046" @default.
• W2022892725 startingPage "065046" @default.
• W2022892725 abstract "Time-resolved electron density, ne, is measured in a low pressure pulsed two-frequency capacitively coupled plasma discharge sustained in Ar and in Ar/CF4/O2 (80 : 10 : 10) gas mixture using a floating resonance hairpin probe. The top electrode is powered by 60 MHz in pulse mode and the bottom electrode is powered by 2 MHz in continuous wave mode. The dependence of time-resolved ne on the low frequency (LF) and high frequency (HF) power levels, operating gas pressure, pulse repetition frequency (PRF) and duty cycle are investigated. It is found that the steady state ne in the long on-phase is greatly influenced by the HF power level and slightly affected by the LF power level in both Ar and Ar/CF4/O2 plasma. The decay time of ne is slow (∼30–90 µs) in the case of Ar plasma and strongly depends on the LF power level, whereas in the case of Ar/CF4/O2 gas mixture it is very fast (∼15 µs) and marginally dependent on LF power level. In Ar plasma the steady state ne is increasing with a rise in operating gas pressure, however, in Ar/CF4/O2 plasma it first increases with gas pressure reaching to the maximum (at 20 mTorr) value and then decreases. The pressure dependence of decay time constant mimics the pressure variation of steady state ne. Furthermore, it is observed that the on-phase electron density is greatly affected by changing the PRF and duty cycle. This effect is more prominent in Ar/CF4/O2 plasma when compared to Ar discharge. In addition, ne is observed to overshoot the steady state densities in the beginning of the on-phase in Ar/CF4/O2 gas mixture, but this effect is either small or absent in the case of Ar plasma." @default.
• W2022892725 created "2016-06-24" @default.
• W2022892725 creator A5003130730 @default.
• W2022892725 creator A5022217279 @default.
• W2022892725 creator A5064680232 @default.
• W2022892725 creator A5068292935 @default.
• W2022892725 date "2014-11-11" @default.
• W2022892725 modified "2023-09-27" @default.
• W2022892725 title "Temporal evolution of electron density in a low pressure pulsed two-frequency (60 MHz/2 MHz) capacitively coupled plasma discharge" @default.
• W2022892725 cites W1966121007 @default.
• W2022892725 cites W1966631978 @default.
• W2022892725 cites W1973305293 @default.
• W2022892725 cites W1982130714 @default.
• W2022892725 cites W1984876632 @default.
• W2022892725 cites W2001137122 @default.
• W2022892725 cites W2006634883 @default.
• W2022892725 cites W2018247079 @default.
• W2022892725 cites W2028679502 @default.
• W2022892725 cites W2041367560 @default.
• W2022892725 cites W2047966468 @default.
• W2022892725 cites W2057593091 @default.
• W2022892725 cites W2064019319 @default.
• W2022892725 cites W2065455126 @default.
• W2022892725 cites W2069116978 @default.
• W2022892725 cites W2069262387 @default.
• W2022892725 cites W2080461130 @default.
• W2022892725 cites W2084903293 @default.
• W2022892725 cites W2085090583 @default.
• W2022892725 cites W2085456433 @default.
• W2022892725 cites W2086195766 @default.
• W2022892725 cites W2087013422 @default.
• W2022892725 cites W2091879134 @default.
• W2022892725 cites W2094167831 @default.
• W2022892725 cites W2123761964 @default.
• W2022892725 cites W2136937054 @default.
• W2022892725 cites W2147092467 @default.
• W2022892725 cites W2150759874 @default.
• W2022892725 cites W2167562880 @default.
• W2022892725 cites W2169516997 @default.
• W2022892725 cites W2171411425 @default.
• W2022892725 doi "https://doi.org/10.1088/0963-0252/23/6/065046" @default.
• W2022892725 hasPublicationYear "2014" @default.
• W2022892725 type Work @default.
• W2022892725 sameAs 2022892725 @default.
• W2022892725 citedByCount "17" @default.
• W2022892725 countsByYear W20228927252016 @default.
• W2022892725 countsByYear W20228927252019 @default.
• W2022892725 countsByYear W20228927252020 @default.
• W2022892725 countsByYear W20228927252021 @default.
• W2022892725 countsByYear W20228927252022 @default.
• W2022892725 countsByYear W20228927252023 @default.
• W2022892725 crossrefType "journal-article" @default.
• W2022892725 hasAuthorship W2022892725A5003130730 @default.
• W2022892725 hasAuthorship W2022892725A5022217279 @default.
• W2022892725 hasAuthorship W2022892725A5064680232 @default.
• W2022892725 hasAuthorship W2022892725A5068292935 @default.
• W2022892725 hasConcept C113196181 @default.
• W2022892725 hasConcept C121332964 @default.
• W2022892725 hasConcept C125485243 @default.
• W2022892725 hasConcept C163258240 @default.
• W2022892725 hasConcept C178790620 @default.
• W2022892725 hasConcept C182862853 @default.
• W2022892725 hasConcept C184779094 @default.
• W2022892725 hasConcept C185592680 @default.
• W2022892725 hasConcept C192562407 @default.
• W2022892725 hasConcept C199822604 @default.
• W2022892725 hasConcept C21881925 @default.
• W2022892725 hasConcept C22175881 @default.
• W2022892725 hasConcept C30646810 @default.
• W2022892725 hasConcept C41008148 @default.
• W2022892725 hasConcept C43617362 @default.
• W2022892725 hasConcept C44280652 @default.
• W2022892725 hasConcept C547737533 @default.
• W2022892725 hasConcept C554190296 @default.
• W2022892725 hasConcept C62520636 @default.
• W2022892725 hasConcept C68687820 @default.
• W2022892725 hasConcept C76155785 @default.
• W2022892725 hasConcept C82706917 @default.
• W2022892725 hasConcept C95974651 @default.
• W2022892725 hasConcept C97355855 @default.
• W2022892725 hasConceptScore W2022892725C113196181 @default.
• W2022892725 hasConceptScore W2022892725C121332964 @default.
• W2022892725 hasConceptScore W2022892725C125485243 @default.
• W2022892725 hasConceptScore W2022892725C163258240 @default.
• W2022892725 hasConceptScore W2022892725C178790620 @default.
• W2022892725 hasConceptScore W2022892725C182862853 @default.
• W2022892725 hasConceptScore W2022892725C184779094 @default.
• W2022892725 hasConceptScore W2022892725C185592680 @default.
• W2022892725 hasConceptScore W2022892725C192562407 @default.
• W2022892725 hasConceptScore W2022892725C199822604 @default.
• W2022892725 hasConceptScore W2022892725C21881925 @default.
• W2022892725 hasConceptScore W2022892725C22175881 @default.
• W2022892725 hasConceptScore W2022892725C30646810 @default.
• W2022892725 hasConceptScore W2022892725C41008148 @default.
• W2022892725 hasConceptScore W2022892725C43617362 @default.
• W2022892725 hasConceptScore W2022892725C44280652 @default.
• W2022892725 hasConceptScore W2022892725C547737533 @default.
• W2022892725 hasConceptScore W2022892725C554190296 @default.

• next