Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022893300> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2022893300 endingPage "1222" @default.
- W2022893300 startingPage "1219" @default.
- W2022893300 abstract "Amorphous carbon nitride films, a-CNx, have been candidates for interlayer insulator materials on ultra large-scale integration (ULSI). The most important property of insulators for ULSI application is low dielectric constant, i.e. low-k. It is reported in this paper the success in preparing carbon nitride films with dielectric constant less than 2. The sample films are prepared by a layer-by-layer method. The preparation consists of two cyclic processes. First process is a preparation of a-CNx thin layer by a nitrogen radical sputtering. Second process is a treatment of a-CNx layer by atomic hydrogen. To understand the characteristic low-k by atomic hydrogen treatment and by a layer-by-layer process, we have studied the effect of hydrogen radicals to a-CNx to get lower dielectric constant materials." @default.
- W2022893300 created "2016-06-24" @default.
- W2022893300 creator A5077311661 @default.
- W2022893300 creator A5091247459 @default.
- W2022893300 date "2002-03-01" @default.
- W2022893300 modified "2023-10-16" @default.
- W2022893300 title "High resistivity and low dielectric constant amorphous carbon nitride films: application to low-k materials for ULSI" @default.
- W2022893300 cites W1973168575 @default.
- W2022893300 cites W2051376092 @default.
- W2022893300 cites W2054175371 @default.
- W2022893300 cites W2092750927 @default.
- W2022893300 cites W2159049957 @default.
- W2022893300 cites W2171158322 @default.
- W2022893300 doi "https://doi.org/10.1016/s0925-9635(01)00718-x" @default.
- W2022893300 hasPublicationYear "2002" @default.
- W2022893300 type Work @default.
- W2022893300 sameAs 2022893300 @default.
- W2022893300 citedByCount "43" @default.
- W2022893300 countsByYear W20228933002012 @default.
- W2022893300 countsByYear W20228933002013 @default.
- W2022893300 countsByYear W20228933002015 @default.
- W2022893300 countsByYear W20228933002016 @default.
- W2022893300 countsByYear W20228933002017 @default.
- W2022893300 countsByYear W20228933002018 @default.
- W2022893300 countsByYear W20228933002021 @default.
- W2022893300 countsByYear W20228933002022 @default.
- W2022893300 countsByYear W20228933002023 @default.
- W2022893300 crossrefType "journal-article" @default.
- W2022893300 hasAuthorship W2022893300A5077311661 @default.
- W2022893300 hasAuthorship W2022893300A5091247459 @default.
- W2022893300 hasConcept C104779481 @default.
- W2022893300 hasConcept C113196181 @default.
- W2022893300 hasConcept C127413603 @default.
- W2022893300 hasConcept C133386390 @default.
- W2022893300 hasConcept C140205800 @default.
- W2022893300 hasConcept C159985019 @default.
- W2022893300 hasConcept C161790260 @default.
- W2022893300 hasConcept C16317505 @default.
- W2022893300 hasConcept C171250308 @default.
- W2022893300 hasConcept C178790620 @default.
- W2022893300 hasConcept C185592680 @default.
- W2022893300 hasConcept C19067145 @default.
- W2022893300 hasConcept C192562407 @default.
- W2022893300 hasConcept C194760766 @default.
- W2022893300 hasConcept C201931942 @default.
- W2022893300 hasConcept C22423302 @default.
- W2022893300 hasConcept C2777492770 @default.
- W2022893300 hasConcept C2779227376 @default.
- W2022893300 hasConcept C42360764 @default.
- W2022893300 hasConcept C49040817 @default.
- W2022893300 hasConcept C512968161 @default.
- W2022893300 hasConcept C56052488 @default.
- W2022893300 hasConcept C65165184 @default.
- W2022893300 hasConcept C8010536 @default.
- W2022893300 hasConceptScore W2022893300C104779481 @default.
- W2022893300 hasConceptScore W2022893300C113196181 @default.
- W2022893300 hasConceptScore W2022893300C127413603 @default.
- W2022893300 hasConceptScore W2022893300C133386390 @default.
- W2022893300 hasConceptScore W2022893300C140205800 @default.
- W2022893300 hasConceptScore W2022893300C159985019 @default.
- W2022893300 hasConceptScore W2022893300C161790260 @default.
- W2022893300 hasConceptScore W2022893300C16317505 @default.
- W2022893300 hasConceptScore W2022893300C171250308 @default.
- W2022893300 hasConceptScore W2022893300C178790620 @default.
- W2022893300 hasConceptScore W2022893300C185592680 @default.
- W2022893300 hasConceptScore W2022893300C19067145 @default.
- W2022893300 hasConceptScore W2022893300C192562407 @default.
- W2022893300 hasConceptScore W2022893300C194760766 @default.
- W2022893300 hasConceptScore W2022893300C201931942 @default.
- W2022893300 hasConceptScore W2022893300C22423302 @default.
- W2022893300 hasConceptScore W2022893300C2777492770 @default.
- W2022893300 hasConceptScore W2022893300C2779227376 @default.
- W2022893300 hasConceptScore W2022893300C42360764 @default.
- W2022893300 hasConceptScore W2022893300C49040817 @default.
- W2022893300 hasConceptScore W2022893300C512968161 @default.
- W2022893300 hasConceptScore W2022893300C56052488 @default.
- W2022893300 hasConceptScore W2022893300C65165184 @default.
- W2022893300 hasConceptScore W2022893300C8010536 @default.
- W2022893300 hasFunder F4320320912 @default.
- W2022893300 hasIssue "3-6" @default.
- W2022893300 hasLocation W20228933001 @default.
- W2022893300 hasOpenAccess W2022893300 @default.
- W2022893300 hasPrimaryLocation W20228933001 @default.
- W2022893300 hasRelatedWork W1509705615 @default.
- W2022893300 hasRelatedWork W1964525623 @default.
- W2022893300 hasRelatedWork W1989098629 @default.
- W2022893300 hasRelatedWork W2005965273 @default.
- W2022893300 hasRelatedWork W2042887735 @default.
- W2022893300 hasRelatedWork W2068388085 @default.
- W2022893300 hasRelatedWork W2068790638 @default.
- W2022893300 hasRelatedWork W2083189760 @default.
- W2022893300 hasRelatedWork W2605601456 @default.
- W2022893300 hasRelatedWork W168284628 @default.
- W2022893300 hasVolume "11" @default.
- W2022893300 isParatext "false" @default.
- W2022893300 isRetracted "false" @default.
- W2022893300 magId "2022893300" @default.
- W2022893300 workType "article" @default.