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- W2022893343 abstract "Anisotropic etching of tungsten submicrometre features has been achieved with an electron-cyclotron-resonance-generated SF/sub 6//Ar plasma. The process is suitable for W Schottky gates for highspeed, high-power GaAs transistors. Tungsten gate sidewall profiles are evaluated as a function of RF bias." @default.
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- W2022893343 date "1994-01-06" @default.
- W2022893343 modified "2023-09-27" @default.
- W2022893343 title "Anisotropic electron cyclotron resonance etching of tungsten films on GaAs" @default.
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- W2022893343 doi "https://doi.org/10.1049/el:19940006" @default.
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