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• W2022903537 endingPage "499" @default.
• W2022903537 startingPage "494" @default.
• W2022903537 abstract "Thermal stability of fluorine-doped silicon dioxide films deposited by high-density plasma chemical vapor deposition as a function of deposition temperature were investigated in this study. Both thermal desorption spectrum and annealing test results show that SiOF films deposited above 400 °C have better thermal stability. Furnace annealing data indicate that non –Si–F– bonding fluorine does exist in low-deposition-temperature SiOF films. Furthermore, secondary-ion mass spectrometer results also reveal that the fluorine in SiOF films with a lower-deposition temperature is easily diffused out and turned into the underlayer, which results in less thermally stable SiOF films. Moreover, short-loop simulation results have been subsequently tested and it was concluded that the deposition temperature of the SiOF film is extremely important for thermal stability." @default.
• W2022903537 created "2016-06-24" @default.
• W2022903537 creator A5003040227 @default.
• W2022903537 creator A5004086042 @default.
• W2022903537 creator A5016066775 @default.
• W2022903537 creator A5021883735 @default.
• W2022903537 creator A5043867538 @default.
• W2022903537 creator A5061778590 @default.
• W2022903537 creator A5076979423 @default.
• W2022903537 creator A5080952794 @default.
• W2022903537 creator A5081770274 @default.
• W2022903537 date "2004-04-14" @default.
• W2022903537 modified "2023-10-13" @default.
• W2022903537 title "Effect of deposition temperature on thermal stability in high-density plasma chemical vapor deposition fluorine-doped silicon dioxide" @default.
• W2022903537 cites W2003428340 @default.
• W2022903537 cites W2032435882 @default.
• W2022903537 cites W2068580835 @default.
• W2022903537 cites W2069808884 @default.
• W2022903537 cites W2118627863 @default.
• W2022903537 cites W2126547685 @default.
• W2022903537 cites W2132055523 @default.
• W2022903537 cites W2157374287 @default.
• W2022903537 cites W2316276263 @default.
• W2022903537 doi "https://doi.org/10.1116/1.1690779" @default.
• W2022903537 hasPublicationYear "2004" @default.
• W2022903537 type Work @default.
• W2022903537 sameAs 2022903537 @default.
• W2022903537 citedByCount "5" @default.
• W2022903537 countsByYear W20229035372013 @default.
• W2022903537 countsByYear W20229035372021 @default.
• W2022903537 crossrefType "journal-article" @default.
• W2022903537 hasAuthorship W2022903537A5003040227 @default.
• W2022903537 hasAuthorship W2022903537A5004086042 @default.
• W2022903537 hasAuthorship W2022903537A5016066775 @default.
• W2022903537 hasAuthorship W2022903537A5021883735 @default.
• W2022903537 hasAuthorship W2022903537A5043867538 @default.
• W2022903537 hasAuthorship W2022903537A5061778590 @default.
• W2022903537 hasAuthorship W2022903537A5076979423 @default.
• W2022903537 hasAuthorship W2022903537A5080952794 @default.
• W2022903537 hasAuthorship W2022903537A5081770274 @default.
• W2022903537 hasConcept C113196181 @default.
• W2022903537 hasConcept C127413603 @default.
• W2022903537 hasConcept C151730666 @default.
• W2022903537 hasConcept C159985019 @default.
• W2022903537 hasConcept C171250308 @default.
• W2022903537 hasConcept C178790620 @default.
• W2022903537 hasConcept C183866003 @default.
• W2022903537 hasConcept C185592680 @default.
• W2022903537 hasConcept C19067145 @default.
• W2022903537 hasConcept C191897082 @default.
• W2022903537 hasConcept C192562407 @default.
• W2022903537 hasConcept C2777855556 @default.
• W2022903537 hasConcept C2779089622 @default.
• W2022903537 hasConcept C2816523 @default.
• W2022903537 hasConcept C38347018 @default.
• W2022903537 hasConcept C42360764 @default.
• W2022903537 hasConcept C49040817 @default.
• W2022903537 hasConcept C506198293 @default.
• W2022903537 hasConcept C544956773 @default.
• W2022903537 hasConcept C57410435 @default.
• W2022903537 hasConcept C57863236 @default.
• W2022903537 hasConcept C59061564 @default.
• W2022903537 hasConcept C64297162 @default.
• W2022903537 hasConcept C75937256 @default.
• W2022903537 hasConcept C86803240 @default.
• W2022903537 hasConceptScore W2022903537C113196181 @default.
• W2022903537 hasConceptScore W2022903537C127413603 @default.
• W2022903537 hasConceptScore W2022903537C151730666 @default.
• W2022903537 hasConceptScore W2022903537C159985019 @default.
• W2022903537 hasConceptScore W2022903537C171250308 @default.
• W2022903537 hasConceptScore W2022903537C178790620 @default.
• W2022903537 hasConceptScore W2022903537C183866003 @default.
• W2022903537 hasConceptScore W2022903537C185592680 @default.
• W2022903537 hasConceptScore W2022903537C19067145 @default.
• W2022903537 hasConceptScore W2022903537C191897082 @default.
• W2022903537 hasConceptScore W2022903537C192562407 @default.
• W2022903537 hasConceptScore W2022903537C2777855556 @default.
• W2022903537 hasConceptScore W2022903537C2779089622 @default.
• W2022903537 hasConceptScore W2022903537C2816523 @default.
• W2022903537 hasConceptScore W2022903537C38347018 @default.
• W2022903537 hasConceptScore W2022903537C42360764 @default.
• W2022903537 hasConceptScore W2022903537C49040817 @default.
• W2022903537 hasConceptScore W2022903537C506198293 @default.
• W2022903537 hasConceptScore W2022903537C544956773 @default.
• W2022903537 hasConceptScore W2022903537C57410435 @default.
• W2022903537 hasConceptScore W2022903537C57863236 @default.
• W2022903537 hasConceptScore W2022903537C59061564 @default.
• W2022903537 hasConceptScore W2022903537C64297162 @default.
• W2022903537 hasConceptScore W2022903537C75937256 @default.
• W2022903537 hasConceptScore W2022903537C86803240 @default.
• W2022903537 hasIssue "3" @default.
• W2022903537 hasLocation W20229035371 @default.
• W2022903537 hasOpenAccess W2022903537 @default.
• W2022903537 hasPrimaryLocation W20229035371 @default.
• W2022903537 hasRelatedWork W1967465319 @default.
• W2022903537 hasRelatedWork W1968446622 @default.
• W2022903537 hasRelatedWork W2003971460 @default.
• W2022903537 hasRelatedWork W2022903537 @default.

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