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- W2022931854 abstract "Steps of monolayer height (0.29 nm) were observed by atomic force microscopy (AFM) after growth of a 600 nm thick epitaxial layer of InP by metalorganic vapour phase epitaxy on a vicinal InP substrate. The mean terrace width of 240 nm was found to be similar to that on a vicinal InP substrate annealed at the growth temperature. The growth mode was consistent with the Burton-Cabrera-Frank (BCF) theory and the steps were “morphologically stable” during growth." @default.
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- W2022931854 date "1993-10-01" @default.
- W2022931854 modified "2023-10-16" @default.
- W2022931854 title "Surface morphology of metalorganic vapour phase epitaxy grown InP observed by atomic force microscopy" @default.
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- W2022931854 doi "https://doi.org/10.1016/0022-0248(93)90120-l" @default.
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