Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022951270> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2022951270 endingPage "2473" @default.
- W2022951270 startingPage "2470" @default.
- W2022951270 abstract "The dry etching technique for indium tin oxide (ITO) films has been investigated using gas with a conventional parallel‐plate‐type reactive ion etching apparatus in order to fabricate ITO fine patterns for thin‐film transistor addressed liquid crystal displays (TFT‐LCDs). Etching rates of amorphous ITO and poly‐ITO were almost the same, unlike the case with ITO wet etching. This demonstrates that the ITO etching rate using gas is independent of the film characteristics. A scanning electron microscopy study of etched ITO films showed that the reaction products were not deposited on the sample surface, although the resist surface was roughened. Al films, which are the underlayers of ITO films for TFT‐LCDs, were not etched by gas only. Therefore, high ITO/Al selectivity can be obtained by gas." @default.
- W2022951270 created "2016-06-24" @default.
- W2022951270 creator A5011975045 @default.
- W2022951270 creator A5049759120 @default.
- W2022951270 creator A5089813297 @default.
- W2022951270 date "1995-07-01" @default.
- W2022951270 modified "2023-09-25" @default.
- W2022951270 title "Indium Tin Oxide Dry Etching Using HBr Gas for Thin‐Film Transistor Liquid Crystal Displays" @default.
- W2022951270 doi "https://doi.org/10.1149/1.2044322" @default.
- W2022951270 hasPublicationYear "1995" @default.
- W2022951270 type Work @default.
- W2022951270 sameAs 2022951270 @default.
- W2022951270 citedByCount "27" @default.
- W2022951270 countsByYear W20229512702012 @default.
- W2022951270 countsByYear W20229512702013 @default.
- W2022951270 countsByYear W20229512702015 @default.
- W2022951270 countsByYear W20229512702017 @default.
- W2022951270 countsByYear W20229512702018 @default.
- W2022951270 countsByYear W20229512702019 @default.
- W2022951270 countsByYear W20229512702020 @default.
- W2022951270 countsByYear W20229512702021 @default.
- W2022951270 crossrefType "journal-article" @default.
- W2022951270 hasAuthorship W2022951270A5011975045 @default.
- W2022951270 hasAuthorship W2022951270A5049759120 @default.
- W2022951270 hasAuthorship W2022951270A5089813297 @default.
- W2022951270 hasConcept C100460472 @default.
- W2022951270 hasConcept C113196181 @default.
- W2022951270 hasConcept C128019096 @default.
- W2022951270 hasConcept C1291036 @default.
- W2022951270 hasConcept C130472188 @default.
- W2022951270 hasConcept C159985019 @default.
- W2022951270 hasConcept C171250308 @default.
- W2022951270 hasConcept C185592680 @default.
- W2022951270 hasConcept C19067145 @default.
- W2022951270 hasConcept C192562407 @default.
- W2022951270 hasConcept C26771246 @default.
- W2022951270 hasConcept C2779227376 @default.
- W2022951270 hasConcept C32737372 @default.
- W2022951270 hasConcept C43617362 @default.
- W2022951270 hasConcept C49040817 @default.
- W2022951270 hasConcept C543292547 @default.
- W2022951270 hasConcept C56052488 @default.
- W2022951270 hasConcept C8010536 @default.
- W2022951270 hasConcept C87359718 @default.
- W2022951270 hasConceptScore W2022951270C100460472 @default.
- W2022951270 hasConceptScore W2022951270C113196181 @default.
- W2022951270 hasConceptScore W2022951270C128019096 @default.
- W2022951270 hasConceptScore W2022951270C1291036 @default.
- W2022951270 hasConceptScore W2022951270C130472188 @default.
- W2022951270 hasConceptScore W2022951270C159985019 @default.
- W2022951270 hasConceptScore W2022951270C171250308 @default.
- W2022951270 hasConceptScore W2022951270C185592680 @default.
- W2022951270 hasConceptScore W2022951270C19067145 @default.
- W2022951270 hasConceptScore W2022951270C192562407 @default.
- W2022951270 hasConceptScore W2022951270C26771246 @default.
- W2022951270 hasConceptScore W2022951270C2779227376 @default.
- W2022951270 hasConceptScore W2022951270C32737372 @default.
- W2022951270 hasConceptScore W2022951270C43617362 @default.
- W2022951270 hasConceptScore W2022951270C49040817 @default.
- W2022951270 hasConceptScore W2022951270C543292547 @default.
- W2022951270 hasConceptScore W2022951270C56052488 @default.
- W2022951270 hasConceptScore W2022951270C8010536 @default.
- W2022951270 hasConceptScore W2022951270C87359718 @default.
- W2022951270 hasIssue "7" @default.
- W2022951270 hasLocation W20229512701 @default.
- W2022951270 hasOpenAccess W2022951270 @default.
- W2022951270 hasPrimaryLocation W20229512701 @default.
- W2022951270 hasRelatedWork W196679807 @default.
- W2022951270 hasRelatedWork W2033860489 @default.
- W2022951270 hasRelatedWork W2051218983 @default.
- W2022951270 hasRelatedWork W2052794911 @default.
- W2022951270 hasRelatedWork W2088651056 @default.
- W2022951270 hasRelatedWork W2171720396 @default.
- W2022951270 hasRelatedWork W2404325184 @default.
- W2022951270 hasRelatedWork W2536147042 @default.
- W2022951270 hasRelatedWork W2923172560 @default.
- W2022951270 hasRelatedWork W836216862 @default.
- W2022951270 hasVolume "142" @default.
- W2022951270 isParatext "false" @default.
- W2022951270 isRetracted "false" @default.
- W2022951270 magId "2022951270" @default.
- W2022951270 workType "article" @default.