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- W2022956916 abstract "Abstract An electron-beam-excited plasma (EBEP) apparatus has the remarkable characteristic that the electron-energy-distribution function (EEDF) can be controlled directly, thus electron-beam energy and density are controlled independently by the accelerating voltage VA and the discharge current ID in the EBEP. As an application of the EBEP, TiO2 films were deposited varying VA and ID in O2 gas at a pressure of 7×10−4 Torr. Color, thickness, and X-ray diffraction pattern of the films were analyzed. The most suitable experimental conditions to deposit anatase TiO2 film for environmental purification are discussed here." @default.
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- W2022956916 date "2000-11-01" @default.
- W2022956916 modified "2023-10-16" @default.
- W2022956916 title "Basic characteristics of TiO2 film for environmental purification deposited by electron-beam-excited plasma" @default.
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- W2022956916 doi "https://doi.org/10.1016/s0042-207x(00)00310-9" @default.
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