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• W2023000227 endingPage "061306" @default.
• W2023000227 startingPage "061306" @default.
• W2023000227 abstract "Reactive d.c. magnetron sputtering in Ar/O2 gas mixtures has been investigated with energy-resolved mass spectrometry. Different metal targets (Mg, Ti, Zn, In, InSn, and Sn), which are of importance for transparent conductive oxide thin film deposition, have been used to study the formation of negative ions, mainly high-energetic O−, which are supposed to induce radiation damage in thin films. Besides their energy distribution, the ions have been particularly investigated with respect to their intensity in comparison of the different target materials. To realize the comparability, various calibration factors had to be introduced. After their application, major differences in the negative ion production have been observed for the target materials. The intensity, especially of O−, differs by about two orders of magnitude. It is shown that this difference results almost exclusively from ions that gain their energy in the target sheath. Those may gain additional energy from the sputtering process or reflection at the target. Low-energetic negative ions are, however, less affected by changes of the target material. The results concerning O− formation are discussed in term of the sputtering rate from the target and are compared to models for negative ion formation." @default.
• W2023000227 created "2016-06-24" @default.
• W2023000227 creator A5003032040 @default.
• W2023000227 creator A5021544846 @default.
• W2023000227 date "2012-11-01" @default.
• W2023000227 modified "2023-10-17" @default.
• W2023000227 title "Negative oxygen ion formation in reactive magnetron sputtering processes for transparent conductive oxides" @default.
• W2023000227 cites W1969589430 @default.
• W2023000227 cites W1970318764 @default.
• W2023000227 cites W1977284103 @default.
• W2023000227 cites W1980412805 @default.
• W2023000227 cites W1983388462 @default.
• W2023000227 cites W1987869495 @default.
• W2023000227 cites W1988669945 @default.
• W2023000227 cites W1989648848 @default.
• W2023000227 cites W1990218632 @default.
• W2023000227 cites W1994764529 @default.
• W2023000227 cites W1999937498 @default.
• W2023000227 cites W2003262087 @default.
• W2023000227 cites W2006233377 @default.
• W2023000227 cites W2008744161 @default.
• W2023000227 cites W2011919472 @default.
• W2023000227 cites W2012979652 @default.
• W2023000227 cites W2035386725 @default.
• W2023000227 cites W2036462861 @default.
• W2023000227 cites W2042019356 @default.
• W2023000227 cites W2050199135 @default.
• W2023000227 cites W2051515376 @default.
• W2023000227 cites W2051955688 @default.
• W2023000227 cites W2052116847 @default.
• W2023000227 cites W2054784026 @default.
• W2023000227 cites W2056883211 @default.
• W2023000227 cites W2057229647 @default.
• W2023000227 cites W2059910227 @default.
• W2023000227 cites W2061139552 @default.
• W2023000227 cites W2062063882 @default.
• W2023000227 cites W2064067009 @default.
• W2023000227 cites W2065138335 @default.
• W2023000227 cites W2068944969 @default.
• W2023000227 cites W2079815545 @default.
• W2023000227 cites W2116418689 @default.
• W2023000227 cites W4244728800 @default.
• W2023000227 doi "https://doi.org/10.1116/1.4762815" @default.
• W2023000227 hasPublicationYear "2012" @default.
• W2023000227 type Work @default.
• W2023000227 sameAs 2023000227 @default.
• W2023000227 citedByCount "39" @default.
• W2023000227 countsByYear W20230002272013 @default.
• W2023000227 countsByYear W20230002272014 @default.
• W2023000227 countsByYear W20230002272015 @default.
• W2023000227 countsByYear W20230002272016 @default.
• W2023000227 countsByYear W20230002272017 @default.
• W2023000227 countsByYear W20230002272018 @default.
• W2023000227 countsByYear W20230002272019 @default.
• W2023000227 countsByYear W20230002272020 @default.
• W2023000227 countsByYear W20230002272021 @default.
• W2023000227 countsByYear W20230002272022 @default.
• W2023000227 countsByYear W20230002272023 @default.
• W2023000227 crossrefType "journal-article" @default.
• W2023000227 hasAuthorship W2023000227A5003032040 @default.
• W2023000227 hasAuthorship W2023000227A5021544846 @default.
• W2023000227 hasConcept C111337013 @default.
• W2023000227 hasConcept C113196181 @default.
• W2023000227 hasConcept C121332964 @default.
• W2023000227 hasConcept C123408415 @default.
• W2023000227 hasConcept C145148216 @default.
• W2023000227 hasConcept C151730666 @default.
• W2023000227 hasConcept C171250308 @default.
• W2023000227 hasConcept C178790620 @default.
• W2023000227 hasConcept C184779094 @default.
• W2023000227 hasConcept C185544564 @default.
• W2023000227 hasConcept C185592680 @default.
• W2023000227 hasConcept C19067145 @default.
• W2023000227 hasConcept C191897082 @default.
• W2023000227 hasConcept C192562407 @default.
• W2023000227 hasConcept C22423302 @default.
• W2023000227 hasConcept C2779851234 @default.
• W2023000227 hasConcept C2816523 @default.
• W2023000227 hasConcept C43617362 @default.
• W2023000227 hasConcept C61427134 @default.
• W2023000227 hasConcept C64297162 @default.
• W2023000227 hasConcept C86803240 @default.
• W2023000227 hasConcept C97892325 @default.
• W2023000227 hasConceptScore W2023000227C111337013 @default.
• W2023000227 hasConceptScore W2023000227C113196181 @default.
• W2023000227 hasConceptScore W2023000227C121332964 @default.
• W2023000227 hasConceptScore W2023000227C123408415 @default.
• W2023000227 hasConceptScore W2023000227C145148216 @default.
• W2023000227 hasConceptScore W2023000227C151730666 @default.
• W2023000227 hasConceptScore W2023000227C171250308 @default.
• W2023000227 hasConceptScore W2023000227C178790620 @default.
• W2023000227 hasConceptScore W2023000227C184779094 @default.
• W2023000227 hasConceptScore W2023000227C185544564 @default.
• W2023000227 hasConceptScore W2023000227C185592680 @default.
• W2023000227 hasConceptScore W2023000227C19067145 @default.
• W2023000227 hasConceptScore W2023000227C191897082 @default.
• W2023000227 hasConceptScore W2023000227C192562407 @default.
• W2023000227 hasConceptScore W2023000227C22423302 @default.

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