FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023003770> ?p ?o ?g. }

• W2023003770 endingPage "176" @default.
• W2023003770 startingPage "171" @default.
• W2023003770 abstract "New structural Pirani gauge-type thermal vacuum sensor with a microheater and two pn junction diodes, Th-A and Th-B, as a high-sensitive temperature sensor working like a thermistor formed on a micro-air-bridge (MAB) is proposed. The MAB is separated into two regions of A and B. The Th-A and the Th-B can measure temperatures of the region A and the region B connected to the region A with thermal resistance, respectively. The microheater is formed in the region A and can maintain its temperature by feedback control. The diode-thermistor, Th-C, formed on the SOI substrate is provided to measure the ambient temperature T c . Principle of this Pirani gauge-type thermal vacuum sensor is based on the measurement of the pressure-dependent thermal conductivity of gaseous media due to the heat exchange between the heated MAB (suspended film) and surrounding gas in vacuum. This has more than two orders of magnitude measurable pressure range (2×10 −3 –1×10 5 Pa) compared with traditional Pirani vacuum sensor, and has very fast response and low power consumption." @default.
• W2023003770 created "2016-06-24" @default.
• W2023003770 creator A5007918106 @default.
• W2023003770 creator A5038480599 @default.
• W2023003770 creator A5057513831 @default.
• W2023003770 creator A5078962603 @default.
• W2023003770 date "2007-02-01" @default.
• W2023003770 modified "2023-10-17" @default.
• W2023003770 title "Proposal of a new structural thermal vacuum sensor with diode-thermistors combined with a micro-air-bridge heater" @default.
• W2023003770 cites W1986109070 @default.
• W2023003770 cites W2039805392 @default.
• W2023003770 cites W2045512677 @default.
• W2023003770 cites W2048831694 @default.
• W2023003770 cites W2051369469 @default.
• W2023003770 cites W2090664140 @default.
• W2023003770 cites W2102545711 @default.
• W2023003770 cites W2149979580 @default.
• W2023003770 cites W2152735110 @default.
• W2023003770 cites W3104295964 @default.
• W2023003770 cites W4252194133 @default.
• W2023003770 doi "https://doi.org/10.1016/j.mejo.2006.09.018" @default.
• W2023003770 hasPublicationYear "2007" @default.
• W2023003770 type Work @default.
• W2023003770 sameAs 2023003770 @default.
• W2023003770 citedByCount "38" @default.
• W2023003770 countsByYear W20230037702012 @default.
• W2023003770 countsByYear W20230037702014 @default.
• W2023003770 countsByYear W20230037702015 @default.
• W2023003770 countsByYear W20230037702017 @default.
• W2023003770 countsByYear W20230037702018 @default.
• W2023003770 countsByYear W20230037702019 @default.
• W2023003770 countsByYear W20230037702020 @default.
• W2023003770 countsByYear W20230037702021 @default.
• W2023003770 countsByYear W20230037702022 @default.
• W2023003770 countsByYear W20230037702023 @default.
• W2023003770 crossrefType "journal-article" @default.
• W2023003770 hasAuthorship W2023003770A5007918106 @default.
• W2023003770 hasAuthorship W2023003770A5038480599 @default.
• W2023003770 hasAuthorship W2023003770A5057513831 @default.
• W2023003770 hasAuthorship W2023003770A5078962603 @default.
• W2023003770 hasConcept C104713690 @default.
• W2023003770 hasConcept C119599485 @default.
• W2023003770 hasConcept C121332964 @default.
• W2023003770 hasConcept C127413603 @default.
• W2023003770 hasConcept C136525101 @default.
• W2023003770 hasConcept C137488568 @default.
• W2023003770 hasConcept C137693562 @default.
• W2023003770 hasConcept C142724271 @default.
• W2023003770 hasConcept C159985019 @default.
• W2023003770 hasConcept C165801399 @default.
• W2023003770 hasConcept C192562407 @default.
• W2023003770 hasConcept C204530211 @default.
• W2023003770 hasConcept C204787440 @default.
• W2023003770 hasConcept C2779426163 @default.
• W2023003770 hasConcept C49040817 @default.
• W2023003770 hasConcept C66726788 @default.
• W2023003770 hasConcept C71924100 @default.
• W2023003770 hasConcept C78434282 @default.
• W2023003770 hasConcept C97346530 @default.
• W2023003770 hasConcept C97355855 @default.
• W2023003770 hasConceptScore W2023003770C104713690 @default.
• W2023003770 hasConceptScore W2023003770C119599485 @default.
• W2023003770 hasConceptScore W2023003770C121332964 @default.
• W2023003770 hasConceptScore W2023003770C127413603 @default.
• W2023003770 hasConceptScore W2023003770C136525101 @default.
• W2023003770 hasConceptScore W2023003770C137488568 @default.
• W2023003770 hasConceptScore W2023003770C137693562 @default.
• W2023003770 hasConceptScore W2023003770C142724271 @default.
• W2023003770 hasConceptScore W2023003770C159985019 @default.
• W2023003770 hasConceptScore W2023003770C165801399 @default.
• W2023003770 hasConceptScore W2023003770C192562407 @default.
• W2023003770 hasConceptScore W2023003770C204530211 @default.
• W2023003770 hasConceptScore W2023003770C204787440 @default.
• W2023003770 hasConceptScore W2023003770C2779426163 @default.
• W2023003770 hasConceptScore W2023003770C49040817 @default.
• W2023003770 hasConceptScore W2023003770C66726788 @default.
• W2023003770 hasConceptScore W2023003770C71924100 @default.
• W2023003770 hasConceptScore W2023003770C78434282 @default.
• W2023003770 hasConceptScore W2023003770C97346530 @default.
• W2023003770 hasConceptScore W2023003770C97355855 @default.
• W2023003770 hasIssue "2" @default.
• W2023003770 hasLocation W20230037701 @default.
• W2023003770 hasOpenAccess W2023003770 @default.
• W2023003770 hasPrimaryLocation W20230037701 @default.
• W2023003770 hasRelatedWork W2001121470 @default.
• W2023003770 hasRelatedWork W2012050503 @default.
• W2023003770 hasRelatedWork W2023003770 @default.
• W2023003770 hasRelatedWork W2057809161 @default.
• W2023003770 hasRelatedWork W2087352711 @default.
• W2023003770 hasRelatedWork W2182282602 @default.
• W2023003770 hasRelatedWork W2626593991 @default.
• W2023003770 hasRelatedWork W4200126404 @default.
• W2023003770 hasRelatedWork W4238387889 @default.
• W2023003770 hasRelatedWork W2307062012 @default.
• W2023003770 hasVolume "38" @default.
• W2023003770 isParatext "false" @default.
• W2023003770 isRetracted "false" @default.
• W2023003770 magId "2023003770" @default.

• next