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- W2023005612 abstract "Proximity mode printing technology has the potential to achieve adequate defect levels for economical fabrication of VLSI devices. The application of deep-UV to proximity mode printing is evaluated in order to extend achievable resolution to greater wafer-to-mask separations. This technique promises to be a viable supplemental technology to wafer stepper technology." @default.
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- W2023005612 date "1980-09-05" @default.
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- W2023005612 title "<title>Evaluation Of Deep-UV Proximity Mode Printing</title>" @default.
- W2023005612 doi "https://doi.org/10.1117/12.958621" @default.
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