FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023014967> ?p ?o ?g. }

• W2023014967 endingPage "3820" @default.
• W2023014967 startingPage "3815" @default.
• W2023014967 abstract "The annealing behavior of carbon implanted at 1.3 MeV with a dose of 5×1019 ions/m2 into Czochralski-grown silicon wafers is investigated using an x-ray double-crystal method, transmission electron microscopy, secondary-ion-mass spectroscopy, and infrared-absorption spectroscopy. For comparison, the behavior of boron implanted at 2.0 MeV with 5×1019 ions/m2 is also investigated. X-ray rocking curve analysis shows that carbon produces a larger lattice strain than boron. For the samples annealed at 1273 K, x-ray data indicate that the carbon atoms, unlike the boron atoms, do not occupy substitutional sites. In addition, the present experimental data suggest that the interaction of interstitial carbon atoms with silicon self-interstitials produced by ion implantation suppresses the generation of dislocations and brings about the reduction of lattice strain in the implanted region." @default.
• W2023014967 created "2016-06-24" @default.
• W2023014967 creator A5015349400 @default.
• W2023014967 creator A5033147491 @default.
• W2023014967 creator A5056997297 @default.
• W2023014967 creator A5075263975 @default.
• W2023014967 date "1993-09-15" @default.
• W2023014967 modified "2023-10-14" @default.
• W2023014967 title "Annealing behavior of MeV implanted carbon in silicon" @default.
• W2023014967 cites W1985187644 @default.
• W2023014967 cites W1990493467 @default.
• W2023014967 cites W1995110785 @default.
• W2023014967 cites W2013605471 @default.
• W2023014967 cites W2013870132 @default.
• W2023014967 cites W2015769918 @default.
• W2023014967 cites W2025381833 @default.
• W2023014967 cites W2026616691 @default.
• W2023014967 cites W2035833349 @default.
• W2023014967 cites W2038391440 @default.
• W2023014967 cites W2075017817 @default.
• W2023014967 cites W2076846937 @default.
• W2023014967 cites W2090412027 @default.
• W2023014967 cites W2091318140 @default.
• W2023014967 cites W2172197770 @default.
• W2023014967 doi "https://doi.org/10.1063/1.354474" @default.
• W2023014967 hasPublicationYear "1993" @default.
• W2023014967 type Work @default.
• W2023014967 sameAs 2023014967 @default.
• W2023014967 citedByCount "26" @default.
• W2023014967 countsByYear W20230149672017 @default.
• W2023014967 countsByYear W20230149672018 @default.
• W2023014967 crossrefType "journal-article" @default.
• W2023014967 hasAuthorship W2023014967A5015349400 @default.
• W2023014967 hasAuthorship W2023014967A5033147491 @default.
• W2023014967 hasAuthorship W2023014967A5056997297 @default.
• W2023014967 hasAuthorship W2023014967A5075263975 @default.
• W2023014967 hasConcept C104779481 @default.
• W2023014967 hasConcept C113196181 @default.
• W2023014967 hasConcept C121332964 @default.
• W2023014967 hasConcept C140205800 @default.
• W2023014967 hasConcept C145148216 @default.
• W2023014967 hasConcept C146088050 @default.
• W2023014967 hasConcept C159985019 @default.
• W2023014967 hasConcept C160671074 @default.
• W2023014967 hasConcept C171250308 @default.
• W2023014967 hasConcept C178790620 @default.
• W2023014967 hasConcept C185592680 @default.
• W2023014967 hasConcept C191897082 @default.
• W2023014967 hasConcept C192562407 @default.
• W2023014967 hasConcept C2777855556 @default.
• W2023014967 hasConcept C32891209 @default.
• W2023014967 hasConcept C41823505 @default.
• W2023014967 hasConcept C43617362 @default.
• W2023014967 hasConcept C49040817 @default.
• W2023014967 hasConcept C501308230 @default.
• W2023014967 hasConcept C544956773 @default.
• W2023014967 hasConcept C62520636 @default.
• W2023014967 hasConcept C8010536 @default.
• W2023014967 hasConceptScore W2023014967C104779481 @default.
• W2023014967 hasConceptScore W2023014967C113196181 @default.
• W2023014967 hasConceptScore W2023014967C121332964 @default.
• W2023014967 hasConceptScore W2023014967C140205800 @default.
• W2023014967 hasConceptScore W2023014967C145148216 @default.
• W2023014967 hasConceptScore W2023014967C146088050 @default.
• W2023014967 hasConceptScore W2023014967C159985019 @default.
• W2023014967 hasConceptScore W2023014967C160671074 @default.
• W2023014967 hasConceptScore W2023014967C171250308 @default.
• W2023014967 hasConceptScore W2023014967C178790620 @default.
• W2023014967 hasConceptScore W2023014967C185592680 @default.
• W2023014967 hasConceptScore W2023014967C191897082 @default.
• W2023014967 hasConceptScore W2023014967C192562407 @default.
• W2023014967 hasConceptScore W2023014967C2777855556 @default.
• W2023014967 hasConceptScore W2023014967C32891209 @default.
• W2023014967 hasConceptScore W2023014967C41823505 @default.
• W2023014967 hasConceptScore W2023014967C43617362 @default.
• W2023014967 hasConceptScore W2023014967C49040817 @default.
• W2023014967 hasConceptScore W2023014967C501308230 @default.
• W2023014967 hasConceptScore W2023014967C544956773 @default.
• W2023014967 hasConceptScore W2023014967C62520636 @default.
• W2023014967 hasConceptScore W2023014967C8010536 @default.
• W2023014967 hasIssue "6" @default.
• W2023014967 hasLocation W20230149671 @default.
• W2023014967 hasOpenAccess W2023014967 @default.
• W2023014967 hasPrimaryLocation W20230149671 @default.
• W2023014967 hasRelatedWork W1969656731 @default.
• W2023014967 hasRelatedWork W1997428111 @default.
• W2023014967 hasRelatedWork W2048269824 @default.
• W2023014967 hasRelatedWork W2063677047 @default.
• W2023014967 hasRelatedWork W2065258228 @default.
• W2023014967 hasRelatedWork W2065669148 @default.
• W2023014967 hasRelatedWork W2074173678 @default.
• W2023014967 hasRelatedWork W2088081281 @default.
• W2023014967 hasRelatedWork W2275386326 @default.
• W2023014967 hasRelatedWork W2546785496 @default.
• W2023014967 hasVolume "74" @default.
• W2023014967 isParatext "false" @default.
• W2023014967 isRetracted "false" @default.
• W2023014967 magId "2023014967" @default.

• next