FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023103615> ?p ?o ?g. }

• W2023103615 endingPage "H271" @default.
• W2023103615 startingPage "H271" @default.
• W2023103615 abstract "In this work we report the deposition and characterization of amorphous thin films of silicon boron carbon nitride . The thin films were deposited in a radio frequency (rf) magnetron sputtering system using reactive cosputtering of silicon carbide and boron nitride (BN) targets. Films of different compositions were deposited by varying the ratios of argon and nitrogen gas in the sputtering ambient. Surface characterization of the deposited films was performed using X-ray photoelectron spectroscopy and optical profilometry. Studies reveal that the chemical state of the films is highly sensitive to nitrogen flow ratios during sputtering. Surface analysis shows that smooth and uniform films can be produced using this technique." @default.
• W2023103615 created "2016-06-24" @default.
• W2023103615 creator A5035140001 @default.
• W2023103615 creator A5064614433 @default.
• W2023103615 creator A5078138605 @default.
• W2023103615 date "2007-01-01" @default.
• W2023103615 modified "2023-10-18" @default.
• W2023103615 title "Effect of N[sub 2]∕Ar Gas Mixture Composition on the Chemistry of SiCBN Thin Films Prepared by RF Reactive Sputtering" @default.
• W2023103615 cites W1681233478 @default.
• W2023103615 cites W1969129494 @default.
• W2023103615 cites W1978280950 @default.
• W2023103615 cites W1993244445 @default.
• W2023103615 cites W2001158744 @default.
• W2023103615 cites W2011245746 @default.
• W2023103615 cites W2018044166 @default.
• W2023103615 cites W2021889234 @default.
• W2023103615 cites W2029199898 @default.
• W2023103615 cites W2039869607 @default.
• W2023103615 cites W2042694744 @default.
• W2023103615 cites W2047805989 @default.
• W2023103615 cites W2054817900 @default.
• W2023103615 cites W2060205815 @default.
• W2023103615 cites W2061622962 @default.
• W2023103615 cites W2070899447 @default.
• W2023103615 cites W2078946818 @default.
• W2023103615 cites W2085680097 @default.
• W2023103615 cites W2095411085 @default.
• W2023103615 cites W2107363212 @default.
• W2023103615 cites W2159994983 @default.
• W2023103615 cites W2164348808 @default.
• W2023103615 cites W2164451931 @default.
• W2023103615 doi "https://doi.org/10.1149/1.2433708" @default.
• W2023103615 hasPublicationYear "2007" @default.
• W2023103615 type Work @default.
• W2023103615 sameAs 2023103615 @default.
• W2023103615 citedByCount "18" @default.
• W2023103615 countsByYear W20231036152012 @default.
• W2023103615 countsByYear W20231036152013 @default.
• W2023103615 countsByYear W20231036152015 @default.
• W2023103615 countsByYear W20231036152018 @default.
• W2023103615 countsByYear W20231036152019 @default.
• W2023103615 countsByYear W20231036152021 @default.
• W2023103615 crossrefType "journal-article" @default.
• W2023103615 hasAuthorship W2023103615A5035140001 @default.
• W2023103615 hasAuthorship W2023103615A5064614433 @default.
• W2023103615 hasAuthorship W2023103615A5078138605 @default.
• W2023103615 hasConcept C113196181 @default.
• W2023103615 hasConcept C127413603 @default.
• W2023103615 hasConcept C171250308 @default.
• W2023103615 hasConcept C175708663 @default.
• W2023103615 hasConcept C178790620 @default.
• W2023103615 hasConcept C185592680 @default.
• W2023103615 hasConcept C19067145 @default.
• W2023103615 hasConcept C192562407 @default.
• W2023103615 hasConcept C194760766 @default.
• W2023103615 hasConcept C22423302 @default.
• W2023103615 hasConcept C2778303786 @default.
• W2023103615 hasConcept C2778489163 @default.
• W2023103615 hasConcept C2779227376 @default.
• W2023103615 hasConcept C2780243435 @default.
• W2023103615 hasConcept C42360764 @default.
• W2023103615 hasConcept C43617362 @default.
• W2023103615 hasConcept C49040817 @default.
• W2023103615 hasConcept C544956773 @default.
• W2023103615 hasConcept C547737533 @default.
• W2023103615 hasConcept C56052488 @default.
• W2023103615 hasConcept C61427134 @default.
• W2023103615 hasConcept C75937256 @default.
• W2023103615 hasConcept C8010536 @default.
• W2023103615 hasConceptScore W2023103615C113196181 @default.
• W2023103615 hasConceptScore W2023103615C127413603 @default.
• W2023103615 hasConceptScore W2023103615C171250308 @default.
• W2023103615 hasConceptScore W2023103615C175708663 @default.
• W2023103615 hasConceptScore W2023103615C178790620 @default.
• W2023103615 hasConceptScore W2023103615C185592680 @default.
• W2023103615 hasConceptScore W2023103615C19067145 @default.
• W2023103615 hasConceptScore W2023103615C192562407 @default.
• W2023103615 hasConceptScore W2023103615C194760766 @default.
• W2023103615 hasConceptScore W2023103615C22423302 @default.
• W2023103615 hasConceptScore W2023103615C2778303786 @default.
• W2023103615 hasConceptScore W2023103615C2778489163 @default.
• W2023103615 hasConceptScore W2023103615C2779227376 @default.
• W2023103615 hasConceptScore W2023103615C2780243435 @default.
• W2023103615 hasConceptScore W2023103615C42360764 @default.
• W2023103615 hasConceptScore W2023103615C43617362 @default.
• W2023103615 hasConceptScore W2023103615C49040817 @default.
• W2023103615 hasConceptScore W2023103615C544956773 @default.
• W2023103615 hasConceptScore W2023103615C547737533 @default.
• W2023103615 hasConceptScore W2023103615C56052488 @default.
• W2023103615 hasConceptScore W2023103615C61427134 @default.
• W2023103615 hasConceptScore W2023103615C75937256 @default.
• W2023103615 hasConceptScore W2023103615C8010536 @default.
• W2023103615 hasIssue "4" @default.
• W2023103615 hasLocation W20231036151 @default.
• W2023103615 hasOpenAccess W2023103615 @default.
• W2023103615 hasPrimaryLocation W20231036151 @default.
• W2023103615 hasRelatedWork W2002269058 @default.
• W2023103615 hasRelatedWork W2009943819 @default.

• next