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- W2023106692 abstract "Epitaxial Si films have been successfully grown by the photochemical vapor deposition process using the mixture of SiH 4 , SiH 2 F 2 and D 2 gases at temperatures from 200 to 475°C. Using H 2 as diluting gas, the epitaxial Si films were obtained at temperatures from 200 to 350°C. However, the upper limit of the growth temperature was raised about 100°C (from 350 to 475°C) by substituting D 2 for H 2 as the diluting gas. Surface morphology and crystallinity were also improved with D 2 . Furthermore, we carried out heavy phosphorous doping with D 2 and obtained a film with an electron concentration of 1×10 21 cm -3 ." @default.
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- W2023106692 date "1991-05-01" @default.
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- W2023106692 title "Effects of Deuterium on Low-Temperature Si Epitaxy by Photo-Chemical Vapor Deposition" @default.
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