Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023123625> ?p ?o ?g. }
Showing items 1 to 68 of
68
with 100 items per page.
- W2023123625 abstract "Nanoelectronic and nanophotonic applications have created a pressure on methods of fabrication double dielectricbarriers stacks with ultrathin silicon layer located between dielectric layers. Among numerous possible methods, PECVDseems to be very promising. In order to increase possible number of applications, however, the ability to transformcontinuous silicon layer into nanocrystalline form in dielectric matrix is required. The work described below reports onexperimental efforts to form such a structure by controlled high temperature recrystallization and oxidation of ultrathinPECVD silicon layer in the stack. The effects if high temperature annealing has been studied by spectroscopicellipsometry. The applied model allowed for identification of composition and structural changes within the siliconPECVD layer due to different high temperature annealing processes applied. As a result of this study, it has been provedthat it is feasible to fabricate complete two barrier stack consisting of ultrathin dielectric and silicon layers in onePECVD system without exposing samples to the ambient atmosphere. In order to reduce the PECVD silicon layerthickness to approximately 3 nm, we proposed using plasma oxidation in PECVD instead of PECVD oxide deposition.High temperature (especially in 1100°C) annealing in argon proved to allow formation of silicon nanocrystals in oxidematrix. Other effects resulting from high temperature annealing of fabricated stacks are also studied." @default.
- W2023123625 created "2016-06-24" @default.
- W2023123625 creator A5005233128 @default.
- W2023123625 creator A5045109587 @default.
- W2023123625 date "2013-07-25" @default.
- W2023123625 modified "2023-09-23" @default.
- W2023123625 title "Formation of ultrathin silicon layers by PECVD and their modification for nanoelectronic and nanophotonic applications" @default.
- W2023123625 doi "https://doi.org/10.1117/12.2030884" @default.
- W2023123625 hasPublicationYear "2013" @default.
- W2023123625 type Work @default.
- W2023123625 sameAs 2023123625 @default.
- W2023123625 citedByCount "2" @default.
- W2023123625 countsByYear W20231236252016 @default.
- W2023123625 countsByYear W20231236252017 @default.
- W2023123625 crossrefType "proceedings-article" @default.
- W2023123625 hasAuthorship W2023123625A5005233128 @default.
- W2023123625 hasAuthorship W2023123625A5045109587 @default.
- W2023123625 hasConcept C133386390 @default.
- W2023123625 hasConcept C159985019 @default.
- W2023123625 hasConcept C171250308 @default.
- W2023123625 hasConcept C18293161 @default.
- W2023123625 hasConcept C19067145 @default.
- W2023123625 hasConcept C192562407 @default.
- W2023123625 hasConcept C2777431650 @default.
- W2023123625 hasConcept C2777855556 @default.
- W2023123625 hasConcept C2779105228 @default.
- W2023123625 hasConcept C38347018 @default.
- W2023123625 hasConcept C49040817 @default.
- W2023123625 hasConcept C544956773 @default.
- W2023123625 hasConceptScore W2023123625C133386390 @default.
- W2023123625 hasConceptScore W2023123625C159985019 @default.
- W2023123625 hasConceptScore W2023123625C171250308 @default.
- W2023123625 hasConceptScore W2023123625C18293161 @default.
- W2023123625 hasConceptScore W2023123625C19067145 @default.
- W2023123625 hasConceptScore W2023123625C192562407 @default.
- W2023123625 hasConceptScore W2023123625C2777431650 @default.
- W2023123625 hasConceptScore W2023123625C2777855556 @default.
- W2023123625 hasConceptScore W2023123625C2779105228 @default.
- W2023123625 hasConceptScore W2023123625C38347018 @default.
- W2023123625 hasConceptScore W2023123625C49040817 @default.
- W2023123625 hasConceptScore W2023123625C544956773 @default.
- W2023123625 hasLocation W20231236251 @default.
- W2023123625 hasOpenAccess W2023123625 @default.
- W2023123625 hasPrimaryLocation W20231236251 @default.
- W2023123625 hasRelatedWork W1975107450 @default.
- W2023123625 hasRelatedWork W1989489661 @default.
- W2023123625 hasRelatedWork W2001496823 @default.
- W2023123625 hasRelatedWork W2013662478 @default.
- W2023123625 hasRelatedWork W2023304010 @default.
- W2023123625 hasRelatedWork W2044117231 @default.
- W2023123625 hasRelatedWork W2076078100 @default.
- W2023123625 hasRelatedWork W2078012652 @default.
- W2023123625 hasRelatedWork W2086714416 @default.
- W2023123625 hasRelatedWork W2088040172 @default.
- W2023123625 hasRelatedWork W2102482594 @default.
- W2023123625 hasRelatedWork W2108758716 @default.
- W2023123625 hasRelatedWork W2122361315 @default.
- W2023123625 hasRelatedWork W2775622230 @default.
- W2023123625 hasRelatedWork W2902313438 @default.
- W2023123625 hasRelatedWork W3094269937 @default.
- W2023123625 hasRelatedWork W3196850864 @default.
- W2023123625 hasRelatedWork W195050232 @default.
- W2023123625 hasRelatedWork W2927680116 @default.
- W2023123625 hasRelatedWork W2928068370 @default.
- W2023123625 isParatext "false" @default.
- W2023123625 isRetracted "false" @default.
- W2023123625 magId "2023123625" @default.
- W2023123625 workType "article" @default.