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- W2023124168 endingPage "2513" @default.
- W2023124168 startingPage "2510" @default.
- W2023124168 abstract "Copolymers of methyl methacrylate and acyloximino methacrylate esters have been evaluated as deep u.v. (200–250 nm) resists. Poly (methyl methacrylate‐co‐3‐methacryloyl‐oximino‐2‐butanone) has been found to be ~5 times faster than PMMA at and capable of submicron resolution. It has been found that the acetyl group of the 3‐oximino‐2‐butanone substituent is more effective than the related species containing t‐butyl, phenyl, or benzoyl groups in promoting polymer degradation. The copolymers have also been exposed to 20 kV electron beam radiation and have been found to be about as sensitive as PMMA ." @default.
- W2023124168 created "2016-06-24" @default.
- W2023124168 creator A5037179224 @default.
- W2023124168 creator A5038411717 @default.
- W2023124168 creator A5078883389 @default.
- W2023124168 date "1980-11-01" @default.
- W2023124168 modified "2023-09-25" @default.
- W2023124168 title "Preliminary Evaluation of Copolymers of Methyl Methacrylate and Acyloximino Methacrylate as Deep U.V. Resists" @default.
- W2023124168 doi "https://doi.org/10.1149/1.2129505" @default.
- W2023124168 hasPublicationYear "1980" @default.
- W2023124168 type Work @default.
- W2023124168 sameAs 2023124168 @default.
- W2023124168 citedByCount "26" @default.
- W2023124168 countsByYear W20231241682016 @default.
- W2023124168 countsByYear W20231241682018 @default.
- W2023124168 crossrefType "journal-article" @default.
- W2023124168 hasAuthorship W2023124168A5037179224 @default.
- W2023124168 hasAuthorship W2023124168A5038411717 @default.
- W2023124168 hasAuthorship W2023124168A5078883389 @default.
- W2023124168 hasConcept C132050475 @default.
- W2023124168 hasConcept C15920480 @default.
- W2023124168 hasConcept C159985019 @default.
- W2023124168 hasConcept C171250308 @default.
- W2023124168 hasConcept C188027245 @default.
- W2023124168 hasConcept C192562407 @default.
- W2023124168 hasConcept C2777935641 @default.
- W2023124168 hasConcept C2779227376 @default.
- W2023124168 hasConcept C2989464291 @default.
- W2023124168 hasConcept C521977710 @default.
- W2023124168 hasConcept C53524968 @default.
- W2023124168 hasConceptScore W2023124168C132050475 @default.
- W2023124168 hasConceptScore W2023124168C15920480 @default.
- W2023124168 hasConceptScore W2023124168C159985019 @default.
- W2023124168 hasConceptScore W2023124168C171250308 @default.
- W2023124168 hasConceptScore W2023124168C188027245 @default.
- W2023124168 hasConceptScore W2023124168C192562407 @default.
- W2023124168 hasConceptScore W2023124168C2777935641 @default.
- W2023124168 hasConceptScore W2023124168C2779227376 @default.
- W2023124168 hasConceptScore W2023124168C2989464291 @default.
- W2023124168 hasConceptScore W2023124168C521977710 @default.
- W2023124168 hasConceptScore W2023124168C53524968 @default.
- W2023124168 hasIssue "11" @default.
- W2023124168 hasLocation W20231241681 @default.
- W2023124168 hasOpenAccess W2023124168 @default.
- W2023124168 hasPrimaryLocation W20231241681 @default.
- W2023124168 hasRelatedWork W1978444047 @default.
- W2023124168 hasRelatedWork W2013669775 @default.
- W2023124168 hasRelatedWork W2021634762 @default.
- W2023124168 hasRelatedWork W2023124168 @default.
- W2023124168 hasRelatedWork W2028685256 @default.
- W2023124168 hasRelatedWork W2036942437 @default.
- W2023124168 hasRelatedWork W2041686704 @default.
- W2023124168 hasRelatedWork W2067853233 @default.
- W2023124168 hasRelatedWork W2315439536 @default.
- W2023124168 hasRelatedWork W2390281625 @default.
- W2023124168 hasVolume "127" @default.
- W2023124168 isParatext "false" @default.
- W2023124168 isRetracted "false" @default.
- W2023124168 magId "2023124168" @default.
- W2023124168 workType "article" @default.