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- W2023139905 abstract "The effect of nitrogen on the denuded zone (DZ) in Czochralski CZ silicon has been investigated. After the DZ formation, the CZ and the nitrogen-doped CZ (NCZ) silicon wafers were subjected to prolonged annealing. It is found that the DZ of the NCZ silicon only shrinks a little during the prolonged annealing, and no new oxygen precipitates are formed in the DZ, which is the same as the corresponding CZ wafer. Therefore, it is considered that no tiny oxygen precipitates existed in the DZ of the NCZ-Si by IG treatment, which can satisfy the requirements of microelectronics industry. Based on the facts, the effect mechanism of nitrogen on the DZ is discussed." @default.
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- W2023139905 date "2004-02-02" @default.
- W2023139905 modified "2023-09-29" @default.
- W2023139905 title "Effect of nitrogen on denuded zone in Czochralski silicon wafer" @default.
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- W2023139905 doi "https://doi.org/10.1088/0268-1242/19/3/047" @default.
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