Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023152114> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2023152114 endingPage "6379" @default.
- W2023152114 startingPage "6371" @default.
- W2023152114 abstract "In this work, real-time coefficient of friction (COF) analysis, in conjunction with a new method for approximating the Sommerfeld Number, is used to determine the extent of normal and shear forces during chemical mechanical planarization (CMP) and to help identify the tribology of the system. A new parameter termed the `tribological mechanism indicator' is defined and extracted from the resulting Stribeck curves. The information on COF, `tribological mechanism indicator' and inter-layer dielectric (ILD) removal rate results in a series of `universal' correlations to help identify polishing conditions for optimized pad life and removal rate. Results further show that abrasive concentration, surface texture and pad grooving dramatically shift the tribology of the system from boundary lubrication to partial lubrication. Trends are explained using several models based on area of contact between wafer and abrasive particles, the extent of lubricity of the system and the compliance of the pad in micro- and macro-scales." @default.
- W2023152114 created "2016-06-24" @default.
- W2023152114 creator A5005111526 @default.
- W2023152114 creator A5019826263 @default.
- W2023152114 date "2003-10-09" @default.
- W2023152114 modified "2023-09-26" @default.
- W2023152114 title "Fundamental Tribological and Removal Rate Studies of Inter-Layer Dielectric Chemical Mechanical Planarization" @default.
- W2023152114 cites W1992047365 @default.
- W2023152114 cites W1992851352 @default.
- W2023152114 cites W2027558267 @default.
- W2023152114 cites W2047819958 @default.
- W2023152114 cites W2091989934 @default.
- W2023152114 cites W2101696591 @default.
- W2023152114 cites W2112348873 @default.
- W2023152114 cites W2122786654 @default.
- W2023152114 cites W2135296373 @default.
- W2023152114 cites W2135837718 @default.
- W2023152114 cites W2212847437 @default.
- W2023152114 cites W2320854491 @default.
- W2023152114 cites W2322964728 @default.
- W2023152114 cites W565984543 @default.
- W2023152114 doi "https://doi.org/10.1143/jjap.42.6371" @default.
- W2023152114 hasPublicationYear "2003" @default.
- W2023152114 type Work @default.
- W2023152114 sameAs 2023152114 @default.
- W2023152114 citedByCount "95" @default.
- W2023152114 countsByYear W20231521142012 @default.
- W2023152114 countsByYear W20231521142013 @default.
- W2023152114 countsByYear W20231521142014 @default.
- W2023152114 countsByYear W20231521142015 @default.
- W2023152114 countsByYear W20231521142016 @default.
- W2023152114 countsByYear W20231521142017 @default.
- W2023152114 countsByYear W20231521142018 @default.
- W2023152114 countsByYear W20231521142019 @default.
- W2023152114 countsByYear W20231521142020 @default.
- W2023152114 countsByYear W20231521142021 @default.
- W2023152114 countsByYear W20231521142022 @default.
- W2023152114 countsByYear W20231521142023 @default.
- W2023152114 crossrefType "journal-article" @default.
- W2023152114 hasAuthorship W2023152114A5005111526 @default.
- W2023152114 hasAuthorship W2023152114A5019826263 @default.
- W2023152114 hasBestOaLocation W20231521141 @default.
- W2023152114 hasConcept C133386390 @default.
- W2023152114 hasConcept C138113353 @default.
- W2023152114 hasConcept C159985019 @default.
- W2023152114 hasConcept C160671074 @default.
- W2023152114 hasConcept C167310744 @default.
- W2023152114 hasConcept C171250308 @default.
- W2023152114 hasConcept C180088628 @default.
- W2023152114 hasConcept C184608416 @default.
- W2023152114 hasConcept C192562407 @default.
- W2023152114 hasConcept C2779227376 @default.
- W2023152114 hasConcept C2780957350 @default.
- W2023152114 hasConcept C49040817 @default.
- W2023152114 hasConcept C8567792 @default.
- W2023152114 hasConceptScore W2023152114C133386390 @default.
- W2023152114 hasConceptScore W2023152114C138113353 @default.
- W2023152114 hasConceptScore W2023152114C159985019 @default.
- W2023152114 hasConceptScore W2023152114C160671074 @default.
- W2023152114 hasConceptScore W2023152114C167310744 @default.
- W2023152114 hasConceptScore W2023152114C171250308 @default.
- W2023152114 hasConceptScore W2023152114C180088628 @default.
- W2023152114 hasConceptScore W2023152114C184608416 @default.
- W2023152114 hasConceptScore W2023152114C192562407 @default.
- W2023152114 hasConceptScore W2023152114C2779227376 @default.
- W2023152114 hasConceptScore W2023152114C2780957350 @default.
- W2023152114 hasConceptScore W2023152114C49040817 @default.
- W2023152114 hasConceptScore W2023152114C8567792 @default.
- W2023152114 hasIssue "Part 1, No. 10" @default.
- W2023152114 hasLocation W20231521141 @default.
- W2023152114 hasOpenAccess W2023152114 @default.
- W2023152114 hasPrimaryLocation W20231521141 @default.
- W2023152114 hasRelatedWork W1530515008 @default.
- W2023152114 hasRelatedWork W2085794478 @default.
- W2023152114 hasRelatedWork W2106409363 @default.
- W2023152114 hasRelatedWork W2109659628 @default.
- W2023152114 hasRelatedWork W2111972194 @default.
- W2023152114 hasRelatedWork W2132350042 @default.
- W2023152114 hasRelatedWork W2380633932 @default.
- W2023152114 hasRelatedWork W2509450151 @default.
- W2023152114 hasRelatedWork W2543872021 @default.
- W2023152114 hasRelatedWork W2921131276 @default.
- W2023152114 hasVolume "42" @default.
- W2023152114 isParatext "false" @default.
- W2023152114 isRetracted "false" @default.
- W2023152114 magId "2023152114" @default.
- W2023152114 workType "article" @default.